Dimple Plate Alignment Using Gap Measurement for Plasma Density Control
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Solution Overview
Problem
Existing plasma processing apparatuses face challenges in precisely controlling plasma density due to improper alignment and positioning of dimple plates, which can lead to damage and reduced reliability.
Innovation Solution
A dimple plate precision adjustment device is introduced, comprising a dimple carrier, dimple spacer, and gap measurers, which allow for precise alignment and adjustment of the dimple plate relative to the antenna electrode, ensuring accurate alignment of slits and dimple pockets to control plasma density effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional alignment methods are used for dimple plates, then the device structure remains simple, but the alignment precision and plasma density control deteriorate
Solution Approach 1:
The patent introduces a dimple carrier as an intermediary component between the dimple plate and the positioning system. The carrier includes protruding members with alignment holes that interface with alignment pins, serving as a mediator to achieve precise alignment without directly modifying the dimple plate structure. This resolves the contradiction by providing precise alignment through an intermediate positioning mechanism.
Solution Approach 2:
The patent replaces traditional mechanical alignment methods with a pin-and-hole alignment mechanism combined with gap measurers. Instead of relying on complex mechanical adjustment systems, the invention uses precise geometric features (alignment pins fitting into alignment holes) and measurement tools (gap measurers with digital displays) to achieve accurate positioning, substituting mechanical complexity with geometric precision and measurement feedback.
2Reliability
If dimple plate alignment is not precisely controlled, then the device structure remains simple, but plasma density control and reliability deteriorate
Solution Approach 1:
The dimple carrier acts as a protective intermediary that facilitates precise alignment and positioning. By introducing this intermediate component with built-in alignment features, the system achieves reliable dimple plate positioning without requiring complex adjustment mechanisms, thereby improving reliability while maintaining relatively simple device structure.
Solution Approach 2:
The patent incorporates gap measurers that provide visual feedback (through digital displays) on the alignment status and gap dimensions. This feedback mechanism allows operators to precisely control the positioning and alignment of the dimple plate, ensuring reliable plasma density control. The feedback from the gap measurers enables real-time adjustment and verification of alignment accuracy.
3Measurement precision
If manual alignment methods are used, then the adjustment process remains simple, but measurement precision and alignment accuracy deteriorate
Solution Approach 1:
The patent replaces manual visual estimation and rough measurement with precision gap measurers that have digital displays. These measurement tools provide accurate numerical readings of gap dimensions, substituting imprecise manual methods with instrumented measurement. The digital feedback makes the measurement process more precise while maintaining operational simplicity through clear visual indication.
Solution Approach 2:
The gap measurers serve as intermediary measurement instruments between the operator and the alignment task. These tools mediate the measurement process by providing precise, easy-to-read digital feedback on gap dimensions, making high-precision measurement accessible without requiring complex operational procedures or specialized skills.
4Productivity
If dimple plate positioning is not precisely controlled, then the adjustment mechanism remains simple, but plasma processing performance deteriorates
Solution Approach 1:
The dimple carrier and alignment pins serve as intermediary positioning mechanisms that enable precise control of dimple plate location. This intermediate positioning system achieves accurate alignment and spacing control without requiring complex adjustment mechanisms, thereby improving plasma processing performance while maintaining relatively simple device structure.
Solution Approach 2:
The gap measurers provide feedback on the positioning accuracy and gap dimensions, enabling operators to optimize the dimple plate placement for maximum plasma processing performance. This feedback mechanism allows precise control of critical parameters (gap size, alignment) that directly affect plasma density and processing quality, improving productivity through measurement-guided adjustment.
Data Source
AI summary
A dimple plate precision adjustment device includes a dimple carrier assembled on a cylindrical dimple plate and capable of transporting the cylindrical dimple plate; a dimple spacer capable of mounting the dimple carrier assembled on the dimple plate; and a plurality of gap measurers installed on the dimple spacer to be spaced apart from each other. The dimple carrier, the dimple spacer, and the gap measurers assembled on the dimple plate are installed in a body of a chamber where an antenna electrode is installed, and the gap measurers measure a gap between the gap measurers and the dimple carrier.