Temperature Control Diode Matrix Inspection for Defect Isolation
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Solution Overview
Problem
Defects in diodes within temperature controlling systems for semiconductor manufacturing cause unwanted heater operations, reducing system reliability.
Innovation Solution
A method is developed to inspect temperature controlling systems by generating a measurement matrix, calculating a transformation matrix, and determining a defect matrix to identify defective diodes using current measurements and matrix operations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a plurality of diodes and heaters are arranged in a matrix for temperature control, then temperature control capability is improved, but system complexity increases making defect identification difficult
Solution Approach 1:
The patent segments the temperature control system into a matrix of independently controllable heater-diode units, each with its own row and column addressing. This segmentation allows defects to be isolated to specific units rather than affecting the entire system, making defect identification manageable despite the large number of components.
Solution Approach 2:
The patent introduces row switching elements and column switching elements as intermediaries between the control system and the heater-diode matrix. These switching elements enable selective activation and measurement of individual units without requiring direct connection to each component, simplifying the control architecture while maintaining full monitoring capability.
2Reliability
If multiple diodes are used in the temperature controlling system, then temperature control reliability is improved, but defect detection becomes more difficult
Solution Approach 1:
The patent implements feedback by measuring current through each diode using column switching elements and comparing measured values against expected values. This feedback mechanism automatically identifies defective diodes by detecting deviations from normal operation, making defect detection systematic and reliable across the entire matrix.
Solution Approach 2:
The patent uses electrical current measurements as an analog to visual indicators, where the measured current value serves as the 'signal' that changes state when a defect is present. By monitoring current through each diode individually via the switching matrix, defective components are identified by their abnormal electrical characteristics rather than visual inspection.
3Measurement precision
If comprehensive current measurement is performed across all diodes, then defect identification accuracy is improved, but measurement time and system resource usage increase
Solution Approach 1:
The patent uses periodic action by systematically cycling through row switching elements and column switching elements in a structured sequence. This periodic measurement approach allows complete coverage of all diodes in the matrix over time while maintaining efficient resource utilization, achieving comprehensive measurement without requiring simultaneous measurement of all components.
Solution Approach 2:
The patent applies dynamics by using time-varying switching patterns where row and column switching elements are activated in different time intervals. This dynamic measurement strategy enables the system to measure all diodes sequentially with high precision while minimizing total measurement time through optimized switching sequences.
Data Source
AI summary
A method of inspecting a temperature controlling system is provided. The method includes generating a measurement matrix based on current measurement values of the temperature controlling system, calculating a transformation matrix having the same dimensions as the measurement matrix based on the measurement matrix, calculating an auxiliary matrix having the same dimensions as the measurement matrix based on the transformation matrix, and calculating a defect matrix representing defective diodes among the plurality of diodes, based on a difference operation between the auxiliary matrix and the transformation matrix.