Direct-Drive Flexure Vacuum Valve Without Dynamic Seals
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Solution Overview
Problem
Conventional vacuum control valves in semiconductor processing tools are complex and costly due to the use of mechanical components like pulleys, belts, ball-screws, linear bearings, and dynamic sealing components, which also introduce contamination and pressure differential issues.
Innovation Solution
A vacuum control valve design utilizing electromagnetic actuators with mechanical flexures that constrain motion along a straight line, eliminating the need for these mechanical components and dynamic sealing, and incorporating a bearing-less flexure-based guidance mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conventional mechanical components (pulleys, belts, ball-screws, linear bearings) are used in vacuum control valves, then motion control is achieved, but device complexity and cost increase
Solution Approach 1:
The patent replaces conventional mechanical motion control components (pulleys, belts, ball-screws, linear bearings) with a direct-drive electromagnetic actuator system. The electromagnetic actuator directly drives the valve member without intermediate mechanical transmission components, eliminating the complexity associated with mechanical motion control while maintaining precise positioning capability.
Solution Approach 2:
The patent extracts and removes the intermediate mechanical transmission components (pulleys, belts, ball-screws, linear bearings) from the valve system. By taking out these unnecessary mechanical elements, the design achieves motion control through a simplified direct-drive electromagnetic actuation mechanism, reducing overall device complexity.
2Reliability
If dynamic sealing components are used in vacuum control valves, then sealing is achieved, but contamination risks increase
Solution Approach 1:
The patent extracts and eliminates dynamic sealing components from the valve system. By removing these potential contamination sources, the design achieves sealing through static seals and a simplified architecture that minimizes parts subject to wear and contamination, thereby improving reliability while reducing harmful contamination factors.
3Ease of operation
If mechanical transmission components are used in vacuum control valves, then motion transfer is achieved, but pressure differential forces are introduced
Solution Approach 1:
The patent replaces mechanical transmission components that are susceptible to pressure differential forces with a direct-drive electromagnetic actuator. The electromagnetic actuation system operates independently of pressure differentials, eliminating the stress and reliability issues associated with mechanical components exposed to pressure variations while maintaining effective motion transfer.
4Ease of operation
If conventional vacuum control valve designs are used, then flow control is achieved, but manufacturing costs increase
Solution Approach 1:
The patent extracts and removes costly mechanical transmission components (pulleys, belts, ball-screws, linear bearings) and dynamic sealing components from the valve design. This simplification reduces part count, assembly complexity, and manufacturing costs while maintaining flow control capability through the direct-drive electromagnetic actuator system.
Solution Approach 2:
The patent substitutes expensive mechanical transmission and sealing components with a more cost-effective direct-drive electromagnetic actuator system. This replacement reduces manufacturing costs by eliminating multiple precision mechanical parts and their associated assembly requirements, while maintaining or improving flow control performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design simplifies the valve structure, reduces contamination risks, eliminates pressure differential forces, and enhances control over fluid flow, improving operational efficiency and reducing costs.
Implementation Method 1
at least one electromagnetic actuator connected between the first member and the second member, where the at least one electromagnetic actuator is configured to move the second member between the open position and the closed position
Implementation Method 2
at least one mechanical flexure connected between the first member and the movable member of the actuator, where the at least one mechanical flexure constrains motion of the movable member to along a substantially straight line
Data Source
AI summary
A valve including a first member including a fluid flow aperture therethrough; a second member movably connected to the first member between an open position and a closed position relative to the fluid flow aperture; at least one electromagnetic actuator connected between the first member and the second member, where the at least one electromagnetic actuator is configured to move the second member between the open position and the closed position, where the at least one electromagnetic actuator includes a first electromagnetic actuator having a stationary portion connected to the first member and a movable portion connected to the second member; and at least one mechanical flexure connected between the first member and the movable member of the actuator, where the at least one mechanical flexure constrains motion of the movable member to along a substantially straight line.