Direct Electron Diffraction Analysis for Same-Lattice Phase Identification

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Solution Overview

Problem

Conventional electron backscatter diffraction methods struggle to accurately distinguish crystalline phases with the same crystal lattice due to similar Kikuchi band thicknesses, limiting the differentiation of phases in samples.

Innovation Solution

Utilizing direct charged particle detectors to directly count the number and measure the energy of backscattered electrons, determining statistical electron characteristics and energy spectra to identify phase characteristics based on chemical composition and crystal orientation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional indirect electron detectors using scintillators are used to detect backscattered electrons, then the detection process can be performed, but the ability to directly count electrons and measure their energies is lost, making phase differentiation difficult

Engineering Contradiction:
Improvephase identification accuracyVSAvoidelectron count and energy information
Core Design Contradiction:
Measurement precisionVSLoss of information

Solution Approach 1:

The patent replaces the indirect mechanical/optical detection system (scintillator converting electrons to photons) with a direct electronic detection system that counts electrons and measures their energies electronically, preserving the original electron information without conversion losses

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces a direct electron detector as an intermediary device between the sample and the detection system, which directly interacts with backscattered electrons to count them and measure their energies, avoiding the information loss that occurs in indirect detection methods

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If conventional particle detectors are used that cannot directly detect electron number or energy, then the detection system is simpler, but the capability to distinguish crystalline phases with same crystal lattice is reduced

Engineering Contradiction:
Improvephase differentiation capabilityVSAvoiddetector system complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The direct electron detector performs multiple functions simultaneously: it counts electrons, measures their energies, and provides spatial information, making the detection system versatile enough to handle various phase differentiation challenges without requiring multiple specialized detectors

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise differentiation of crystalline phases by analyzing the number and energy of backscattered electrons, improving the accuracy of phase identification in samples with the same crystal lattice.

Implementation Method 1

Electron backscatter diffraction is a well-known technique for characterising the crystallographic structure of samples. An electron beam incident on a sample interacts with atoms of the sample, causing the electrons to be scattered at varying angles as they leave the sample.

Methodology Applied
Scientific EffectElectron backscatter diffraction: Diffraction

Data Source

PatentUS20260056147A1Electron count and energy enhanced diffraction analysis
Publication Date: 2026.02.26 FEI CO
  • US20260056147A1 patent drawing
  • US20260056147A1 patent drawing
  • US20260056147A1 patent drawing

AI summary

Methods identify phase characteristics of a sample. Methods comprise obtaining backscattered electron data of the sample using a direct charged particle detector. Direct charged particle detectors comprise an array of pixels and is configured to count the number of backscattered electrons, or to measure the energy of each backscattered electron, detected by each pixel of the array when an electron beam is incident upon the sample. Backscattered electron data sets comprise the number of, or the measured energies of, the backscattered electrons detected by each pixel of the array when the electron beam is incident upon a respective region of the sample. Methods further comprise determining, for each data set, a respective statistical electron characteristic or a respective electron energy spectrum, and identifying a respective phase characteristic for at least some of the regions of the sample, based on the determined statistical electron characteristics or the determined electron energy spectra.