Direct Transfer Mechanism Reducing Standby Time in Semiconductor Stations
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Solution Overview
Problem
In semiconductor production factories, transfer systems often experience reduced operational efficiency due to processing objects not being transferred to available process apparatuses, leading to standby states and decreased operation rates.
Innovation Solution
A transfer system is designed with a process apparatus control unit, a station, a transfer device, and a station control unit, where the station control unit communicates with the process apparatus control unit to load and unload processing objects directly between the station and a connected process apparatus, eliminating the need for carriers between the station and the process apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If processing objects are sequentially transferred to process apparatuses using carriers, then the system maintains stability and ease of operation, but the operation rate decreases due to standby states when process apparatuses are available but no processing objects are being transferred
Solution Approach 1:
The patent extracts the carrier from the transfer path between the station and the connected process apparatus. The transfer device directly loads processing objects from the station to the connected process apparatus without using a carrier, eliminating the time required for carrier-based transfer and reducing standby time when process apparatuses are available.
Solution Approach 2:
The patent introduces a transfer device as an intermediary mechanism between the station and the connected process apparatus. This transfer device enables direct transfer of processing objects without carriers, improving transfer speed and reducing the loss of time while maintaining system stability through controlled communication between control units.
2Productivity
If carriers are used to transfer processing objects between the station and process apparatuses, then the system is more adaptable and versatile, but the device complexity increases and operation rate decreases
Solution Approach 1:
The carrier is completely removed from the transfer mechanism between the station and connected process apparatus. This extraction simplifies the system by eliminating carrier-related components and operations, reducing device complexity while improving operation rate through direct transfer.
Solution Approach 2:
The transfer device is merged directly with the station structure, integrating the transfer function into the existing station. This merging eliminates the need for separate carrier systems and reduces overall device complexity while maintaining the ability to transfer processing objects efficiently.
3Ease of operation
If the station control unit controls the transfer device through communication with the process apparatus control unit, then the ease of operation improves, but the device complexity increases
Solution Approach 1:
The station control unit is given multi-functionality by enabling it to directly control the transfer device through communication with the process apparatus control unit. This universal control capability improves ease of operation by centralizing control functions while the communication protocol manages the complexity of coordinating multiple components.
Data Source
AI summary
In a transfer system, at least one of a plurality of process apparatuses is connected to a station as a connected process apparatus. A station control unit controls a transfer device provided in the station through a communication with a process apparatus control unit to load the processing object to the connected process apparatus from the station and to unload the processing object from the connected process apparatus to the station. The station control unit controls the transfer device to begin unloading of the processing object from the connected process apparatus to the station after receiving a signal indicative of a presence of the processing object to be unloaded from the process apparatus control unit.