Direct-Write Lithography for Geometric Phase Holograms

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Solution Overview

Problem

Existing direct-write lithography methods are limited in creating arbitrary inhomogeneous polarization patterns with rotational symmetry and uniform polarization, requiring scanning in one or two dimensions, which restricts the complexity and precision of patterned birefringent elements like geometric phase holograms (GPHs).

Innovation Solution

A direct-write lithography system with three-dimensional computer-controlled scanning, using a UV laser and a polarization selector stage, allows for arbitrary inhomogeneous optical axis orientation profiles by scanning a polarization map with three degrees of freedom, enabling the creation of GPHs with high precision and resolution.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If one or two dimensions of scanning are used to create patterned birefringent elements, then the manufacturing process is simpler, but the spatial patterns are limited to rotationally symmetric or one-dimensional patterns

Engineering Contradiction:
Improvescanning system complexityVSAvoidpattern complexity
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The patent transitions from one or two-dimensional scanning to three-dimensional scanning by adding a rotational stage that enables the beam to scan in azimuth, elevation, and radial dimensions. This third dimension (rotational scanning) allows creation of arbitrary two-dimensional spatial patterns including non-rotationally symmetric patterns, breaking the limitation of conventional direct-write lithography methods

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If a square aperture stop is used to produce a spot with step-shaped intensity profile, then discrete exposure cells can be created, but overlapping of neighboring cells becomes detrimental and stepwise scanning is required

Engineering Contradiction:
Improvepolarization uniformity within cellsVSAvoidscanning efficiency
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent changes the aperture shape from square to circular, which fundamentally alters the intensity profile from step-shaped to Gaussian-like. This parameter change eliminates the need for stepwise scanning and allows continuous scanning while maintaining polarization uniformity, as the circular aperture naturally provides smooth intensity transitions without sharp edges that cause overlapping problems

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If fixed shadow masks or holographic interference patterns are used for photo-alignment, then alignment domains with uniform optical axis orientations can be created, but arbitrary inhomogeneous polarization patterns with continuous variation cannot be achieved

Engineering Contradiction:
Improveoptical axis orientation uniformityVSAvoidpolarization pattern flexibility
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The patent replaces static fixed shadow masks or holographic patterns with a dynamic scanning system where the beam position and polarization state are continuously varied in three dimensions. This dynamic approach allows arbitrary inhomogeneous polarization patterns with continuous spatial variation to be written, while maintaining optical axis uniformity within each scanned position through controlled exposure parameters

Inventive Principle:
Principle #15Dynamics

4Manufacturing precision

If a pulsed laser is used to create spatially varied form-birefringence in glass, then micro-waveplates can be formed as discrete spots, but continuous arbitrary polarization patterns cannot be fabricated

Engineering Contradiction:
Improvebirefringence controlVSAvoidpattern continuity
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The patent employs continuous scanning of the laser beam in three dimensions rather than discrete pulsed exposure at fixed positions. This continuous action allows arbitrary continuous polarization patterns to be written across the substrate, transforming the process from creating discrete micro-waveplates to fabricating continuous inhomogeneous birefringent structures with spatially varying optical axes

Inventive Principle:
Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the fabrication of GPHs with spatial resolutions of a few microns and orientation angle resolutions of a few milliradians, allowing for the production of compact, aberration-free lenses and other optical elements with enhanced properties compared to traditional methods.

Implementation Method 1

Photo-alignment polymers have been developed for use in liquid crystal displays and other optical elements where it may be desirable to have different orientations of the optical axis at different regions on the sample. Photo-alignment polymers may be exposed (i.e., patterned) using UV lamps or lasers shining through one or more fixed shadow masks

Methodology Applied
Scientific EffectPhoto-alignment: Photopolymerisation

Implementation Method 2

Polarization holography can also be used to create alignment profiles with continuous variation of the optical axis orientation to form polarization gratings

Methodology Applied
Scientific EffectPolarization holography: Polarisation

Data Source

PatentEP2906974B1Direct write lithography for the fabrication of geometric phase holograms
Publication Date: 2023.01.04 IMAGINEOPTIX CORP
  • EP2906974B1 patent drawingFigure 1~2C
  • EP2906974B1 patent drawingFigure 3A~5
  • EP2906974B1 patent drawingFigure 6A~6D

AI summary

A direct-write lithography apparatus includes a polarization selector stage configured to vary a polarization orientation angle of light from a light source, a focusing element configured to focus the light from the light source into a spot at a focal plane thereof, and a scanning stage configured to scan the spot in at least two dimensions along a surface of a polarization-sensitive recording medium that is arranged proximate to the focal plane such that neighboring scans substantially overlap. The polarization selector stage and the scanning stage are configured to be operated independently of one another. Related fabrication methods of and optical elements fabricated thereby are also discussed.