Disaggregated Base Die Stacking for Higher-Yield Semiconductor Arrays

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional stacked semiconductor die architectures face issues with decreasing yield and increased fabrication time due to mounting multiple dies on a single monolithic base die, which requires time-intensive joining operations.

Innovation Solution

The architecture involves disaggregating the monolithic base die into multiple base dies and using a carrier wafer with embedded semiconductor dies, reducing the number of joining operations and incorporating passive semiconductor devices to improve yield and reduce fabrication time.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If multiple stacked semiconductor dies are mounted on a single monolithic base die, then the array size of stacked dies is increased, but the yield of the base die diminishes and fabrication time increases

Engineering Contradiction:
Improvearray size of stacked semiconductor diesVSAvoidyield of base die
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent divides the monolithic base die into multiple smaller base dies, each capable of supporting a subset of the stacked semiconductor dies. This segmentation prevents yield loss affecting the entire array if a defect is found in one base die, while still achieving the desired large array size through parallel processing of multiple smaller units.

Inventive Principle:
Principle #1Segmentation

2Quantity of substance

If multiple stacked semiconductor dies are mounted on a single monolithic base die, then the array size of stacked dies is increased, but the fabrication time increases due to time-intensive joining operations

Engineering Contradiction:
Improvearray size of stacked semiconductor diesVSAvoidfabrication time
Core Design Contradiction:
Quantity of substanceVSLoss of time

Solution Approach 1:

By segmenting the base die into multiple smaller units, the patent enables parallel processing during fabrication. Multiple base dies can be prepared, tested, and assembled simultaneously rather than sequentially on a single large monolithic base die, significantly reducing overall fabrication time.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements preliminary testing and validation of individual base dies before final assembly with stacked semiconductor dies. This preliminary action allows for early detection of defects, preventing rework of entire large arrays and reducing fabrication time by avoiding late-stage failures.

Inventive Principle:
Principle #10Preliminary action

3Quantity of substance

If multiple stacked semiconductor dies are mounted on a single monolithic base die, then the array size of stacked dies is increased, but the fabrication cost increases

Engineering Contradiction:
Improvearray size of stacked semiconductor diesVSAvoidfabrication cost
Core Design Contradiction:
Quantity of substanceVSEase of manufacture

Solution Approach 1:

The patent segments the base die into multiple smaller units that can be manufactured using standard fabrication processes, avoiding the need for expensive large-wafer processing equipment. This segmentation enables cost-effective production while achieving large array sizes through assembly of multiple smaller units.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements a strategy where individual base dies are tested and validated independently before final assembly. If a defect is detected in a base die, only that specific unit is discarded rather than the entire large array, maximizing yield recovery and reducing fabrication costs.

Inventive Principle:
Principle #34Discarding and recovering

Data Source

PatentUS12438123B2Stacked semiconductor die architecture with multiple layers of disaggregation
Publication Date: 2025.10.07 INTEL CORP
  • US12438123B2 patent drawing
  • US12438123B2 patent drawing
  • US12438123B2 patent drawing

AI summary

Stacked semiconductor die architectures having one or more base dies and techniques of forming such architectures are described. The stacked semiconductor die architectures may be included in or used to form semiconductor packages. A stacked semiconductor die architecture can include: (i) one or more base dies (e.g., at least one disaggregated base die, at least one monolithic base die, etc.); and (ii) a carrier wafer having multiple stacked semiconductor dies embedded in the carrier wafer, where the carrier wafer is on the one or more base dies and where one or more interconnect structures (e.g., wires, bumps, microbumps, pillars, etc.) couple the one or more base dies to the carrier wafer and/or the stacked semiconductor dies.