Disc-Type Acousto-Optic Gyroscope Signal Sensitivity
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Solution Overview
Problem
MEMS solid-state wave gyroscopes suffer from lower accuracy and dynamic response capability compared to fiber-optic gyroscopes due to geometric topology constraints and weak signal detection, with the existing distribution of key components leading to attenuated signal sensitivity.
Innovation Solution
A chip-level disc-type acousto-optic standing wave gyroscope is designed with a circular disc substrate, featuring a radial acoustic wave drive module and annular optical detection module, incorporating an annular interdigitated transducer, metallic pillars, and reflection grating to increase the area affected by secondary surface acoustic waves, enhancing sensitivity through Mach-Zehnder interference and phase modulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If key components (interdigitated transducers, reflection gratings, waveguides) are distributed in a scattered manner, then the device structure is simpler to manufacture, but the waveguide area exposed to secondary surface acoustic waves is reduced, greatly attenuating signal sensitivity
Solution Approach 1:
The patent integrates the interdigitated transducer, reflection grating, and waveguide into a unified disc-type structure where all components are arranged in a compact circular layout. The waveguide is positioned to maximize exposure to secondary surface acoustic waves generated by the interdigitated transducer, while the reflection grating is strategically placed to enhance the acoustic field. This merging of components in a coordinated arrangement increases the waveguide area exposed to acoustic waves, thereby improving signal sensitivity without requiring scattered component distribution.
Solution Approach 2:
The patent transitions from a planar or linear component arrangement to a three-dimensional disc-type structure with radial and azimuthal dimensions. The waveguide is configured to extend through multiple layers and angles, maximizing its exposure to the secondary surface acoustic waves generated in the radial direction by the interdigitated transducer. This dimensional transformation allows the waveguide to interact more effectively with the acoustic field in multiple spatial dimensions, enhancing signal sensitivity.
2Measurement precision
If a conventional gyroscope structure is used, then the device is easier to manufacture, but the detection sensitivity and accuracy are limited due to weak signal detection
Solution Approach 1:
The patent modifies key structural parameters of the gyroscope, including the radial arrangement of the interdigitated transducer fingers, the curvature radius of the waveguide, and the positioning of the reflection grating. These parameter changes are optimized to maximize the generation and utilization of secondary surface acoustic waves, thereby enhancing the detection sensitivity. The disc-type geometry with specific radial and azimuthal dimensions is designed to resonate at frequencies that amplify the acoustic-optic interaction, improving signal strength without requiring complex fabrication processes.
Solution Approach 2:
The patent employs composite material structures, particularly in the substrate and waveguide layers, combining materials with different acoustic and optical properties. The substrate incorporates piezoelectric materials for efficient acoustic wave generation, while the waveguide uses materials with high optical confinement and low acoustic attenuation. This composite material approach enhances both the acoustic field generation and optical detection efficiency, improving detection sensitivity while maintaining manufacturability through standard semiconductor fabrication techniques.
3Measurement precision
If the waveguide area exposed to secondary surface acoustic waves is increased, then the signal sensitivity is improved, but the device complexity increases
Solution Approach 1:
The patent employs a curved, disc-type waveguide configuration instead of straight or angular paths. The waveguide follows a circular or annular trajectory that naturally maximizes its exposure to the radially propagating secondary surface acoustic waves. This curved geometry allows the waveguide to maintain a constant distance from the acoustic source around the entire perimeter, ensuring uniform and maximum acoustic-optic interaction throughout the waveguide length. The curvature is optimized to match the acoustic wave propagation pattern, enhancing signal sensitivity while maintaining a relatively simple single-piece waveguide structure that can be fabricated using standard photolithography and etching processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design improves detection sensitivity and accuracy by optimizing the distribution of waveguides and surface acoustic waves, reducing signal loss and enhancing signal conversion rates, while maintaining robustness and impact resistance.
Implementation Method 1
an annular interdigitated transducer, a metal electrode layer group uniformly sputtered on the annular interdigitated transducer, annularly arranged metallic pillars and an annular reflection grating
Implementation Method 2
chip-level disc-type acousto-optic standing wave gyroscope
Implementation Method 3
enhancing sensitivity through Mach-Zehnder interference and phase modulation
Implementation Method 4
a metal electrode layer group uniformly sputtered on the annular interdigitated transducer
Data Source
AI summary
Disclosed is a chip-level disc-type acousto-optic standing wave gyroscope including a substrate and a gyroscope structure placed on an upper surface of the substrate; the substrate is in a shape of a circular disc; the gyroscope structure includes an acoustic wave drive module and an optical detection module, the acoustic wave drive module is arranged in a circular shape taking the center of the circular disc as an origin and extending outward radially, and the optical detection module is arranged in the middle of the acoustic wave drive module and is annular; the acoustic wave drive module includes an annular interdigitated transducer, a metal electrode layer group uniformly sputtered on the annular interdigitated transducer, annularly arranged metallic pillars and an annular reflection grating, respectively placed in sequence from center of the disk radially to periphery of the disk; the optical detection module includes a first grating coupler, an optical waveguide at a light source input end, a first coupler, a second coupler, an optical waveguide at a signal output end and a second grating coupler, which are connected in sequence. According to the technical solution of the disclosure, the sensitivity of gyroscope detection can be improved.