Discharge Electrode Gas Passage Layout for Uniform Plasma Treatment

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Solution Overview

Problem

Conventional surface modifying devices face issues with nonuniform gas pressure distribution in the discharge electrode, leading to variations in surface modification precision and instability, especially when reducing the amount of replacement gas supplied, which affects the treatment of wide films like those with a width of 10 meters.

Innovation Solution

The device employs a manifold pipe system with gas guide holes and a supporting member to maintain uniform gas pressure and directivity, ensuring stable surface modification by evenly distributing replacement gas through the electric field, even with reduced gas usage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If replacement gas is supplied into the entire electrode chamber, then the gas concentration can be maintained, but the amount of replacement gas required increases significantly for wide films

Engineering Contradiction:
Improveamount of replacement gasVSAvoidsurface modification precision
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The gas supply system is segmented into multiple regions corresponding to different sections of the wide film. Instead of supplying gas uniformly to the entire electrode chamber, the patent divides the discharge electrode into multiple segments with individual gas supply channels, allowing localized gas distribution matched to the actual discharge regions across the film width.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies local quality by providing different gas concentrations and flow rates to different regions of the electrode chamber based on local discharge characteristics. Gas is supplied directly to specific discharge regions rather than uniformly throughout the chamber, optimizing gas utilization while maintaining surface modification precision in each local area.

Inventive Principle:
Principle #3Local quality

2Area of stationary object

If the electrode chamber is enlarged to accommodate wide films, then the treatment capacity increases, but the gas supply requirement and system complexity increase

Engineering Contradiction:
Improveelectrode chamber areaVSAvoidgas supply system complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The electrode chamber and discharge electrode are segmented into multiple independent sections, each with its own gas supply channel. This segmentation allows the system to handle wide films by extending the treatment area while maintaining manageable gas supply complexity through modular, distributed gas distribution rather than a single complex supply system.

Inventive Principle:
Principle #1Segmentation

3Manufacturing precision

If replacement gas is supplied directly to the discharge region, then gas concentration uniformity improves, but gas pressure nonuniformity along the supply direction increases

Engineering Contradiction:
Improvesurface modification uniformityVSAvoidgas pressure distribution
Core Design Contradiction:
Manufacturing precisionVSStress or pressure

Solution Approach 1:

The patent incorporates preliminary action by introducing throttle members (such as adjustable valves or flow restrictors) in each gas supply channel before the gas reaches the discharge region. These throttle members pre-regulate the gas flow and pressure in each channel, compensating for pressure drops and ensuring uniform gas pressure and concentration at the discharge regions across the entire film width.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration stabilizes surface modification treatment on wide films by maintaining uniform gas pressure and preventing pressure variations, allowing for efficient plasma generation with minimal gas consumption.

Implementation Method 1

a surface modifying device that uses a corona discharge to perform surface treatment on the surface of a base material

Methodology Applied
Scientific EffectCorona discharge: Corona Discharge

Implementation Method 2

a high-frequency voltage is applied to the discharge electrode to generate an electric field between the discharge electrode and the above-described treatment roller

Methodology Applied
Scientific EffectElectric field: Electric Field

Data Source

PatentEP3666819B1Surface modifying device
Publication Date: 2025.07.23 KASUGA DENKI INC
  • EP3666819B1 patent drawingFigure 1
  • EP3666819B1 patent drawingFigure 2
  • EP3666819B1 patent drawingFigure 3

AI summary

[Problem] The present invention addresses the problem of reducing the supply quantity of a replacement gas by directly discharging the gas from a discharge electrode, and stabilizing plasma generation by uniformizing gas pressure distribution. [Solution] A discharge electrode E in an electrode chamber C comprises a plurality of electrode members 8, 9. The electrode members 8, 9 are disposed facing each other by having a supporting member 4 therebetween, a gap is formed between the facing portions of the electrode members 8, 9, and by having the gap as a gas passageway 15, the gas passageway is opened in the leading end of the discharge electrode. A replacement gas having been supplied from a manifold pipe 3 is supplied to the gas passageway 15 via an orifice.