Discharge Lamp Base Cooling via Segmented Air Flow Paths

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Solution Overview

Problem

Conventional discharge lamp cooling mechanisms are inefficient in cooling the base member, leading to reduced cooling action and significant light blockage from the discharge lamp, especially when cooling the free-end side base.

Innovation Solution

A discharge lamp design incorporating a base member with a relay member and a coupling member for electrically conductive materials, along with a flow path for a cooling medium, and a connecting cable with a flexible tubular member and covering member for efficient power and cooling medium supply, allowing for effective cooling of the base member while minimizing light blockage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If conventional cooling mechanisms blow cool air against the bulb part, then the bulb part is cooled, but the cooling action on the base is insufficient

Engineering Contradiction:
Improvebase temperatureVSAvoidcooling efficiency
Core Design Contradiction:
TemperatureVSProductivity

Solution Approach 1:

The cooling mechanism is segmented into two independent cooling paths: one for the bulb part and another for the base. The base cooling path includes a base cooling air blowing pipe that supplies cool air to the base through a base cooling air blowing hole, while the bulb cooling path uses the traditional air blowing pipe. This segmentation allows each component to be cooled effectively without interfering with the other.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A base cooling air blowing pipe is introduced as an intermediary component to deliver cool air to the base. This pipe is positioned to supply cool air to the base without blocking the light path, serving as a mediator between the cooling system and the base while avoiding the light blockage problem of conventional approaches.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Temperature

If piping for air blowing is installed around the base on the free end side, then cooling action on the base is improved, but light from the discharge lamp is blocked

Engineering Contradiction:
Improvebase temperatureVSAvoidlight intensity
Core Design Contradiction:
TemperatureVSIllumination intensity

Solution Approach 1:

The base cooling air blowing hole is positioned at a specific location on the base where it can effectively cool the base while being positioned outside the light path. The hole is formed at a location that allows cool air to reach the base without the piping structure interfering with the light from the discharge lamp, thus achieving local cooling without compromising illumination.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

Instead of installing piping around the base in a way that blocks light, the cooling air is supplied through a hole formed in the base itself or through a pipe positioned in a different spatial arrangement. This dimensional repositioning allows the cooling function to be achieved without the piping structure occupying the light path space.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides enhanced cooling action on the base member of the discharge lamp, reducing light blockage and maintaining high light utilization efficiency, thereby minimizing temperature rise and improving image formation characteristics in exposure applications.

Implementation Method 1

a flow path that is provided in the relay member and the coupling member for supplying a cooling medium to the base member

Methodology Applied
Scientific EffectHeat transfer: Conduction (thermal)

Implementation Method 2

a relay member that is provided in the base member and is formed with an electrically conductive material; a coupling member that has an electrically conductive member that is electrically connected with the relay member

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 3

a discharge lamp that houses electrodes for electric discharge in a glass member

Methodology Applied
Scientific EffectElectric discharge: Electric Arc

Data Source

PatentUS9165738B2Discharge lamp, connecting cable, light source apparatus, and exposure apparatus
Publication Date: 2015.10.20 NIKON CORP
  • US9165738B2 patent drawing
  • US9165738B2 patent drawing
  • US9165738B2 patent drawing

AI summary

A light source device having a large cooling action on the base member of a discharge lamp. A connector on the sides of the power supply and the air blower and the base-side connector of a discharge lamp are connected to each other through a connection cable having a power cable in which an air blow pipe is contained. An electric power is supplied from the power supply to a base part through the power cable of the connection cable, the base-side connector and a flow passage bending member. The cool air from the air blower is supplied to the groove part of the base part through the air blow pipe of the connection cable, the base-side connector and an air blow passage in the flow passage-bending member.