Discontinuous Semiconductor Bonding for Low-Stress Singulation

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Solution Overview

Problem

Conventional semiconductor fabrication methods for solid-state transducer devices, such as LEDs, result in significant stresses on substrates and attached LEDs during bonding and singulation processes, leading to warping, delamination, misalignments, and increased complexity.

Innovation Solution

The use of discontinuous bonds formed by aligning a device substrate with a patterned carrier substrate, where the device substrate is bonded to the carrier substrate with individual bond sections or segments, reducing mechanical stress and eliminating the need to singulate through high-stress bonding materials, thereby minimizing substrate bowing and warping.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If continuous bonding material is used to bond device substrate to carrier substrate, then bonding strength is improved, but mechanical stress increases causing substrate warping and delamination

Engineering Contradiction:
Improvebonding strengthVSAvoidmechanical stress
Core Design Contradiction:
StrengthVSStress or pressure

Solution Approach 1:

The bonding material is divided into multiple discrete bond sections rather than forming a continuous layer. Each bond section independently bonds the device substrate to the carrier substrate at specific locations, distributing mechanical stress across multiple discrete points rather than creating uniform stress across a continuous bonding interface. This segmentation reduces overall mechanical stress while maintaining adequate bonding strength through the distributed bond sections.

Inventive Principle:
Principle #1Segmentation

2Strength

If continuous bonding material is used, then bonding strength is improved, but substrate warping and delamination occur

Engineering Contradiction:
Improvebonding strengthVSAvoidsubstrate stability
Core Design Contradiction:
StrengthVSStability of the object's composition

Solution Approach 1:

By segmenting the bonding material into discrete sections, the patent prevents the uniform stress distribution that causes substrate warping and delamination. Each discrete bond section creates localized bonding points that do not collectively induce the bending moments and stress concentrations that occur with continuous bonding, thereby maintaining substrate stability while achieving adequate bonding strength.

Inventive Principle:
Principle #1Segmentation

3Productivity

If singulation is performed through bonding material and substrate, then individual devices are obtained, but process complexity and stress increase

Engineering Contradiction:
Improvedevice singulationVSAvoidsingulation process complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent extracts or removes the bonding material from the singulation path by positioning discrete bond sections away from the intended singulation lines. This allows singulation to proceed through the substrate alone without having to cut through bonding material, significantly simplifying the singulation process and reducing the stresses associated with cutting through multiple material layers.

Inventive Principle:
Principle #2Taking out (Extraction)

4Productivity

If larger substrates are used, then manufacturing efficiency is improved, but mechanical stress and warping increase

Engineering Contradiction:
Improvemanufacturing efficiencyVSAvoidmechanical stress
Core Design Contradiction:
ProductivityVSStress or pressure

Solution Approach 1:

The discrete bond sections distribute mechanical stress across multiple localized points rather than creating uniform stress across the entire substrate surface. This stress distribution mechanism enables the use of larger substrates for improved manufacturing efficiency and yield, as the segmented bonding approach prevents the cumulative stress and warping that would otherwise occur with continuous bonding over large substrate areas.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS11901342B2Discontinuous patterned bonds for semiconductor devices and associated systems and methods
Publication Date: 2024.02.13 MICRON TECHNOLOGY INC
  • US11901342B2 patent drawing
  • US11901342B2 patent drawing
  • US11901342B2 patent drawing

AI summary

Discontinuous bonds for semiconductor devices are disclosed herein. A device in accordance with a particular embodiment includes a first substrate and a second substrate, with at least one of the first substrate and the second substrate having a plurality of solid-state transducers. The second substrate can include a plurality of projections and a plurality of intermediate regions and can be bonded to the first substrate with a discontinuous bond. Individual solid-state transducers can be disposed at least partially within corresponding intermediate regions and the discontinuous bond can include bonding material bonding the individual solid-state transducers to blind ends of corresponding intermediate regions. Associated methods and systems of discontinuous bonds for semiconductor devices are disclosed herein.