Discrete-Time Thermal Control Loop With Digital Heating Array

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Solution Overview

Problem

The semiconductor industry faces challenges in efficiently processing and manufacturing increasingly complex and smaller integrated circuits, requiring advancements in IC design, processing, and manufacturing to maintain performance and reduce costs.

Innovation Solution

A discrete time loop based control system is implemented using digital circuitry, incorporating a modulator with an error amplifier, discrete time controller, quantizer, switched array, and sensor, which enables precise thermal management by tracking a desired temperature setting and stabilizing the control loop.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If discrete time loop based control system is implemented using digital circuitry, then space savings are achieved and performance is improved, but device complexity increases

Engineering Contradiction:
Improvecircuit spaceVSAvoidcontrol system complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The patent replaces analog circuitry with digital circuitry in the control system. Specifically, analog components such as continuous voltage signals and analog integrators are substituted with digital components including discrete time controllers, quantizers, and digital signal processing elements. This substitution achieves space savings through more efficient circuit implementation while maintaining control functionality.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent transforms the control system from continuous-time analog parameters to discrete-time digital parameters. The continuous analog control signals are converted to discrete digital values through quantization, and the control loop operates at discrete time intervals rather than continuously. This parameter transformation enables the use of digital logic circuits that occupy less space while providing comparable or superior performance.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If semiconductor device scaling down is pursued, then production efficiency is increased and costs are lowered, but processing complexity increases

Engineering Contradiction:
Improveproduction efficiencyVSAvoidprocessing complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent divides the control system into discrete functional blocks that can be independently designed and manufactured. The control system is segmented into distinct modules including the error amplifier, discrete time controller, quantizer, and switched array, each performing a specific function. This segmentation allows for modular manufacturing and assembly, reducing processing complexity despite device scaling.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The discrete time controller is designed as a universal building block that can be applied across different semiconductor devices and thermal management applications. The same controller architecture serves multiple functions including temperature regulation, power management, and system stabilization, thereby simplifying the overall processing requirements while maintaining high production efficiency.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for space savings while meeting or exceeding the performance of equivalent analog circuitry, effectively managing thermal conditions and improving manufacturing efficiency in semiconductor devices.

Implementation Method 1

a heating array coupled to the multiple bits quantizer, wherein the heating array is configured to generate heat based on the digital code output

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

an output measurement value is taken based on the output using a temperature sensor embedded within the heating array

Methodology Applied
Scientific EffectTemperature sensing: Thermocouple

Data Source

PatentUS12339717B2Discrete time loop based thermal control
Publication Date: 2025.06.24 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12339717B2 patent drawing
  • US12339717B2 patent drawing
  • US12339717B2 patent drawing

AI summary

In an embodiment, a circuit includes: an error amplifier; a temperature sensor, wherein the temperature sensor is coupled to the error amplifier; a discrete time controller coupled to the error amplifier, wherein the discrete time controller comprises digital circuitry; a multiple bits quantizer coupled to the discrete time controller, wherein the multiple bits quantizer produces a digital code output; and a heating array coupled to the multiple bits quantizer, wherein the heating array is configured to generate heat based on the digital code output.