Dispense Head Calibration for Uniform Droplet Control

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Solution Overview

Problem

In nano-fabrication processes, particularly in imprint lithography, achieving uniform droplet volumes and diameters across multiple dispense heads is challenging, leading to variations in residual layer thickness and pattern transfer issues due to the lack of precise control over drop volumes and diameters.

Innovation Solution

A lithographic system with a fluid dispense system that uses a dispense head with adjustable voltage to control droplet volume and diameter, employing a calibration method to match drop volumes across multiple dispense heads, ensuring consistent residual layer thickness through voltage adjustments and image analysis for precise pattern formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If multiple dispense heads are used to increase productivity, then the output of the lithographic system is improved, but variations in droplet volumes and diameters occur leading to residual layer thickness variations

Engineering Contradiction:

ImproveoutputVSAvoidresidual layer thickness uniformity

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The patent applies parameter changes by adjusting the voltage applied to each dispense head individually. By varying the voltage parameter, the system compensates for manufacturing variations between multiple dispense heads, ensuring uniform droplet volumes and diameters across all heads, thereby maintaining residual layer thickness uniformity while preserving high productivity

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent implements feedback through image analysis of deposited droplets to measure actual droplet volumes and diameters. This measurement feedback is used to calculate and apply corrected voltage values to each dispense head, creating a closed-loop control system that eliminates variations between multiple heads while maintaining high output

Inventive Principle:

Principle #23Feedback

2Manufacturing precision

If voltage is adjusted to control droplet volume and diameter, then manufacturing precision is improved, but device complexity increases due to calibration requirements

Engineering Contradiction:

Improvedroplet volume controlVSAvoidcalibration system

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent applies self-service by enabling the dispense heads to self-calibrate through automated image analysis and voltage adjustment. Each dispense head independently undergoes measurement and correction without requiring manual intervention, reducing operational complexity while maintaining precise droplet volume control

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The patent uses parameter changes to simplify the calibration process by adjusting only the voltage parameter rather than mechanical components. This electrical parameter adjustment is more precise and easier to automate than mechanical calibration, reducing device complexity while achieving accurate droplet control

Inventive Principle:

Principle #35Parameter changes

3Ease of operation

If standard voltage is applied to all dispense heads, then ease of operation is maintained, but droplet volume uniformity deteriorates

Engineering Contradiction:

Improveoperation simplicityVSAvoiddroplet volume uniformity

Core Design Contradiction:

Ease of operationVSManufacturing precision

Solution Approach 1:

The patent applies preliminary action by performing automated calibration of each dispense head before production use. The system pre-determines the optimal voltage for each head through image analysis and stores these values for automatic application during operation, eliminating the need for manual adjustment while ensuring droplet uniformity

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent implements feedback through automated image analysis that measures droplet characteristics and adjusts voltage settings accordingly. This closed-loop system maintains droplet volume uniformity while requiring minimal operator intervention, as the system automatically compensates for variations between dispense heads

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system achieves uniform droplet volumes and diameters, reducing residual layer thickness variations to within a targeted tolerance of +/-10 nm, enhancing pattern fidelity and process control in nano-fabrication.

Implementation Method 1

uses a dispense head with adjustable voltage to control droplet volume and diameter

Methodology Applied

Scientific EffectElectrostatic control: Electrostatics

Implementation Method 2

employing a calibration method to match drop volumes across multiple dispense heads, ensuring consistent residual layer thickness through voltage adjustments and image analysis for precise pattern formation

Methodology Applied

Scientific EffectImage analysis: Image Processing

Data Source

PatentUS8480933B2Fluid dispense device calibration

Publication Date: 2013.07.09 MOLECULAR IMPRINTS INC

AI summary

Systems and methods for calibrating a dispense head to provide substantially uniform droplets on a substrate are described.