Dispenser Faceplate Material Accumulation Detection
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Solution Overview
Problem
The existing methods for inspecting the faceplate of a dispenser in nanoimprint lithography systems are inefficient, often requiring manual visual inspection or unnecessary cleaning, which interrupts production and lacks real-time detection of accumulated formable material.
Innovation Solution
A method and system utilizing sensors angled at acute and obtuse angles relative to the faceplate's longitudinal axis to measure distances and determine the amount of accumulated formable material, allowing for non-contact detection and minimizing production interruptions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual visual inspection or predetermined-time cleaning is used to detect accumulation on the faceplate, then the detection of accumulated material is achieved, but production is interrupted and efficiency is reduced
Solution Approach 1:
The patent replaces manual visual inspection and mechanical cleaning operations with an optical detection system. A sensor translates across the faceplate to detect accumulated formable material through optical measurements, eliminating the need for production-interrupting manual inspection while maintaining accurate detection capability.
Solution Approach 2:
The detection system enables the faceplate inspection process to serve itself automatically during or between production cycles. The sensor system autonomously monitors accumulation levels and triggers cleaning only when necessary, allowing the system to self-regulate maintenance needs without external intervention or production interruption.
2Reliability
If cleaning is performed regardless of accumulation amount after predetermined time or operations, then the faceplate is maintained clean, but unnecessary cleaning interrupts production
Solution Approach 1:
The patent implements a feedback-based control system where the sensor continuously monitors the actual accumulation level on the faceplate and provides this information to a control mechanism. Cleaning operations are triggered only when the feedback indicates accumulation exceeds a predetermined threshold, rather than following a fixed time or operation schedule. This ensures the faceplate is cleaned based on actual need, maintaining reliability while eliminating unnecessary production interruptions.
3Measurement precision
If frequent inspection is performed to ensure faceplate cleanliness, then accumulation is detected early, but production time is lost to inspection activities
Solution Approach 1:
The patent enables continuous monitoring of faceplate accumulation through the sensor system that can translate across the faceplate during or between production cycles without significant interruption. The optical detection can operate continuously or near-continuously, providing constant feedback on accumulation levels while maintaining production flow, thus achieving both accurate detection and minimal time loss.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables real-time, non-contact detection of accumulated material on the dispenser faceplate, reducing unnecessary cleaning and minimizing production disruptions by accurately determining when cleaning is required.
Implementation Method 1
translating a sensor across the length of the faceplate while measuring a distance between the sensor and the faceplate
Data Source
AI summary
A method of inspecting a dispenser including a faceplate comprises translating a sensor across the faceplate while measuring a distance between the sensor and the faceplate. The sensor is oriented such that a longitudinal axis of the sensor extends at an acute angle relative to a longitudinal axis of the faceplate. The method may include translating another sensor across the faceplate while measuring the same distance. Or the method may include another translating of the sensor across the faceplate while measuring the same distance. In either case, the sensor is oriented such that the longitudinal axis of the sensor extends at an obtuse angle relative to the longitudinal axis of the faceplate. The method includes determining, based on the measured distances, whether an amount of accumulated formable material on the surface of the faceplate is greater than a predetermined value.