Liquid Dispensing Gas Removal Conduit and Thermistor Sensor
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Solution Overview
Problem
Conventional liner-based pressure dispensing systems face issues with headspace gas entrainment, gas permeation, bubble formation, and inefficient detection of empty conditions, leading to contamination, waste, and operational malfunctions in microelectronic device manufacturing.
Innovation Solution
A fluid dispensing system with distinct gas and liquid extraction conductions, a reservoir-based gas separation device, and thermistor-based sensors for detecting fluid presence and phase changes, ensuring continuous liquid flow and minimizing gas saturation in the source material.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a liner-based pressure dispensing system is used to dispense liquid from a source vessel, then the liquid can be discharged by displacement with pressurized medium, but headspace gas becomes entrained in the liquid and causes contamination and bubble formation
Solution Approach 1:
The patent extracts and removes the headspace gas from the source vessel before liquid dispensing begins. A gas removal conduit is provided that extends into the headspace volume of the source vessel, allowing gas to be extracted and vented to the atmosphere or a vacuum source, thereby eliminating the harmful gas entrainment problem while maintaining efficient pressure dispensing
Solution Approach 2:
The patent segments the fluid extraction function into two separate conduits: one for gas removal and one for liquid dispensing. This segmentation allows independent control of gas and liquid flow paths, enabling complete gas removal before liquid extraction begins, thus preventing bubble formation and contamination
2Productivity
If pressurized gas is applied to the exterior surface of the liner to force liquid through the dispensing assembly, then liquid dispensing is achieved, but gas permeates through the liner and becomes dissolved in the liquid
Solution Approach 1:
The patent removes dissolved gas from the liquid by providing a gas extraction conduit that extends into the liquid stream. As liquid is dispensed under pressure, dissolved gas comes out of solution and is extracted through the gas conduit, preventing bubble formation downstream and maintaining liquid purity
Solution Approach 2:
The patent performs preliminary gas removal by establishing a gas extraction path before liquid dispensing begins. The system is configured to remove headspace gas first, then subsequently remove dissolved gas as it comes out of solution during pressurized dispensing, thereby preventing contamination before it occurs
3Ease of operation
If conventional sensing systems are used to detect empty conditions in the source vessel, then basic level detection is achieved, but detection precision is insufficient for accurate empty condition identification
Solution Approach 1:
The patent replaces conventional mechanical float-based level sensors with optical sensing elements. Light sources and photodetectors are positioned to detect changes in light transmission or reflection as the liquid level drops, providing precise empty condition detection without mechanical contact with the liquid, thereby improving both accuracy and ease of operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively removes headspace gas, prevents bubble entrainment, and accurately detects empty conditions, enhancing the purity and utilization of liquids in microelectronic device manufacturing by maintaining a near-zero headspace and reducing waste.
Implementation Method 1
a first thermistor in sensory communication with the fluid at a first location within the fluid circuit, the first thermistor arranged to be driven at a first current level sufficient to cause self-heating of the first thermistor upon exposure of a sensing portion thereof to gas
Implementation Method 2
the first thermistor arranged to be driven at a first current level sufficient to cause self-heating of the first thermistor upon exposure of a sensing portion thereof to gas
Implementation Method 3
A gas extraction conduit extending between a gas extraction opening exposed to the interior volume and a gas outlet
Implementation Method 4
a reservoir body defining an interior volume including therein a filtration medium adapted to permit passage of liquid but prevent passage of bubbles
Data Source
AI summary
A dispensing assembly for a pressure dispense package includes a connector having separate and distinct liquid and extraction conduits, and having a pressurization gas conduit. A liner fitment adapter may include a longitudinal bore to receive a probe portion of a connector defining a liquid extraction conduit, and may include a lateral bore to enable removal of gas. Insertion of a connector into a dispensing assembly simultaneously makes fluidic connections between (a) a gas extraction conduit and a dispensing volume; (b) a liquid extraction conduit and the dispensing volume, and (c) a pressurization gas conduit and a space to be pressurized within a pressure dispense vessel.