Displaceable Part Oscillatory Actuation for MEMS
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Solution Overview
Problem
Existing assemblies with displaceable parts, such as micromirrors, rely on electrostatic drives for angular adjustments, which limit design flexibility and functionality.
Innovation Solution
An actuator device is used to set flexible joining components into oscillatory motion, enabling the displaceable part to move angularly without an electrostatic drive, allowing for three-dimensional displacement and integration with various optical components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If electrostatic drives are used for angular adjustments of displaceable parts, then the micromirror can be adjusted in two spatial directions, but the design flexibility and functionality are limited
Solution Approach 1:
The patent replaces the electrostatic drive system with a mechanical oscillatory motion system. An actuator device sets the flexible joining component into oscillatory motion, which mechanically translates into angular displacement of the displaceable part. This substitution enables three-dimensional displacement capabilities while avoiding the design limitations of electrostatic drives.
Solution Approach 2:
The patent introduces dynamic oscillatory motion to achieve static positioning effects. By setting the flexible joining component into controlled oscillatory motion, the displaceable part achieves angular adjustments in multiple directions. The dynamic approach allows for enhanced versatility compared to static electrostatic drive configurations.
2Volume of moving object
If electrostatic tilting drives are used to adjust micromirror in two spatial directions, then angular adjustment is achieved, but the system occupies more space and increases manufacturing cost
Solution Approach 1:
The patent employs a flexible joining component that acts as a thin, compliant element connecting the mounting support to the displaceable part. This flexible component enables angular adjustments through oscillatory motion while occupying minimal space. The flexible film approach replaces bulky electrostatic drive structures with a compact, space-efficient mechanical solution.
3Adaptability or versatility
If flexible joining components are set into oscillatory motion by actuator device, then three-dimensional displacement is enabled, but the control complexity increases
Solution Approach 1:
The patent utilizes periodic oscillatory motion to achieve three-dimensional displacement of the displaceable part. The actuator device generates controlled periodic movements of the flexible joining component, which translate into angular adjustments in multiple directions. This periodic action approach simplifies control compared to attempting direct multi-axis positioning, as the oscillatory nature inherently provides the necessary degrees of freedom.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances design options and functionality by enabling the displaceable part to be positioned accurately and efficiently in multiple axes, suitable for a range of optical applications using MEMS technology, ensuring cost-effective and space-saving manufacturability.
Implementation Method 1
An actuator device (70, 72) is provided which is configured to set the at least one outer end (18) of the at least one flexible joining component (16) into oscillatory motion
Implementation Method 2
the displaceable part (14) may be set into the angular oscillatory motion about a first rotational axis (30) perpendicular to a first axis (26), in which the at least one outer end (18) of the at least one flexible joining component (16) is set into linear oscillatory motion
Data Source
AI summary
A component having a mounting support, a displaceable part, which is joined to the mounting support by at least one flexible joining component, and an actuator device. The actuator device is configured to set at least one subunit of the displaceable part and/or of the at least one flexible joining component into a first oscillatory motion along a first axis in such a manner, that the displaceable part may be set into an angular oscillatory motion about a first rotational axis. The actuator device is additionally configured to set the same and/or another subunit into a second oscillatory motion having a motion component along a second axis at an inclination to the first axis, in such a manner, that, in addition to the angular oscillatory motion, the displaceable part is displaceable about a second rotational axis.