Displacement Detection Using Dynamic Coefficient for Nonlinear Error

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Solution Overview

Problem

Existing techniques for detecting the displacement of a movable positioning object with respect to a reference position in actual space are inaccurate due to the nonlinear relationship between image displacement and actual space displacement, which varies with the distance between the object and the imager.

Innovation Solution

A displacement detecting apparatus and method that uses an imager to capture images of the positioning object, where the displacement is calculated by multiplying the distance between the object's position in the image and the reference position by a coefficient determined by the object's size in the image, thereby accounting for the object's distance from the imager.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a constant proportionality coefficient is used to convert image displacement to actual space displacement, then the calculation method is simple, but the detection accuracy deteriorates due to the nonlinear relationship between image displacement and actual space displacement

Engineering Contradiction:
Improvecalculation methodVSAvoiddetection accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent applies the dynamics principle by making the proportionality coefficient variable rather than constant. The coefficient is dynamically adjusted based on the distance between the positioning object and the imager, allowing the system to adapt to changing conditions and maintain high measurement precision across different object positions while keeping the calculation method relatively simple.

Inventive Principle:
Principle #15Dynamics

2Loss of information

If the positioning object is relatively close to the imager, then the displacement in the image is relatively large making detection easier, but the conversion to actual space displacement becomes less accurate due to the nonlinear relationship

Engineering Contradiction:
Improvedisplacement detection sensitivityVSAvoidactual space displacement accuracy
Core Design Contradiction:
Loss of informationVSMeasurement precision

Solution Approach 1:

The patent applies parameter changes by adjusting the proportionality coefficient based on the object's distance from the imager. When the object is closer to the imager, a different coefficient is used compared to when it is farther away. This dynamic parameter adjustment compensates for the nonlinear relationship and maintains accurate conversion from image displacement to actual space displacement across varying distances.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS10580163B2Displacement detecting apparatus, displacement detecting method and substrate processing apparatus
Publication Date: 2020.03.03 SCREEN HOLDINGS CO LTD
  • US10580163B2 patent drawing
  • US10580163B2 patent drawing
  • US10580163B2 patent drawing

AI summary

A displacement detecting apparatus according to the invention comprises: a mover which moves and positions a positioning object; an imager which images an image including an imaging object which is the positioning object or an object displacing integrally with the positioning object as the positioning object is displaced; and a displacement detector which detects the imaging object from the image imaged by the imager and detects a displacement of the positioning object based on the position of the imaging object detected in the image, wherein the displacement detector obtains a displacement amount of the positioning object with respect to a predetermined reference position from a value obtained by multiplying a distance between the position of the imaging object and the reference position in the image by a coefficient determined according to size of the imaging object in the image.