Multi-Layer Displacement Device Conductor Arrangement
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Solution Overview
Problem
Existing multi-degree-of-freedom displacement devices, such as maglev planar motors, face limitations in motor force improvement due to reduced space ratios of conductive materials, which restricts the enhancement of motor force and positioning accuracy.
Innovation Solution
The displacement device incorporates a stator magnet array with periodically arranged first and second magnets and a rotor with X-coil and Y-coil arrays, where conductors are strategically placed in two conductor layers to maximize conductor space ratio, allowing for efficient Lorentz force generation and improved motor performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If coils are arranged with hollow structures and do not fill the hollow portions, then the structure is simplified and manufacturing is easier, but the space ratio of conductive materials is reduced, limiting motor force improvement
Solution Approach 1:
The patent transitions from a single-layer coil arrangement to a multi-layer conductor configuration. Conductors are arranged in multiple layers (first conductor layer and second conductor layer) with specific spacing, effectively utilizing three-dimensional space. This dimensional change allows conductive materials to fill previously hollow portions while maintaining manufacturing simplicity through standardized layering patterns.
Solution Approach 2:
The patent implements a nested conductor arrangement where conductors in different layers are positioned to interlock and fill hollow portions of adjacent coils. The first and second conductor layers are nested within the overall coil structure, with conductors strategically placed to maximize space utilization. This nesting approach increases the space ratio of conductive materials without complicating the individual coil structures.
2Force
If conductor space ratio is increased by filling hollow portions, then motor force is improved, but the device complexity increases due to multi-layer conductor arrangement
Solution Approach 1:
The patent segments the conductor arrangement into distinct first and second conductor layers, each with specific functions and positions. This segmentation allows for systematic organization of conductors, making the multi-layer arrangement manageable. Each layer can be independently designed and manufactured, then assembled together, reducing overall device complexity despite the increased conductor space ratio.
Solution Approach 2:
The multi-layer conductor arrangement serves multiple functions simultaneously: it increases the space ratio of conductive materials for improved motor force, maintains magnetic field uniformity through strategic positioning, and provides structural support. The standardized layering pattern also simplifies manufacturing processes, offsetting the apparent complexity with operational efficiency.
3Force
If multi-layer conductor arrangement is implemented, then conductor space ratio and motor force are enhanced, but manufacturing precision requirements increase
Solution Approach 1:
The patent incorporates preliminary positioning features and standardized layering patterns that guide conductor placement during manufacturing. The first and second conductor layers are designed with predetermined positions and spacing, allowing for pre-alignment and assembly. This preliminary action reduces the precision requirements during final assembly, as the conductors are already positioned according to the optimized multi-layer configuration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the conductor space ratio, enabling increased motor force and positioning accuracy, allowing the device to achieve six degrees of freedom motion with higher efficiency and reduced mechanical friction, suitable for precision applications like lithography and microelectronic equipment.
Implementation Method 1
a multi-degree-of-freedom displacement device called a maglev planar motor is used in a wafer stage and a reticle stage of a lithography machine, which can provide a multi-axis motion through applying an electromagnetic force directly to the wafer stage, based on the Lorentz force principle
Data Source
AI summary
A displacement device (1), including: a stator magnet array (10) including a plurality of first magnets (11) and a plurality of second magnets (12), the first magnets (11) and the second magnets (12) being arranged periodically in a first plane (X-Y plane); and a rotor (20) including at least a first X-coil array (A11) of a plurality of first X-coils (L11) and a first Y-coil array (A12) of a plurality of first Y-coils (L12). A body portion of the first X-coil array (A11) is disposed in a first conductor layer that is substantially parallel to the first plane (X-Y plane), and a body portion of the first Y-coil array (A12) is disposed in a second conductor layer that is substantially parallel to the first plane (X-Y plane), the first conductor layer and the second conductor layer are disposed at a distance from each other in a direction perpendicular to the first plane (X-Y plane). The first X-coils (L11) includes a pair of first XX conductors (C111) extending in a first direction and a pair of first XY conductors (C112) extending in a second direction substantially perpendicular to the first direction. The first direction and the second direction are both substantially parallel to the first plane (X-Y plane). At least one of the pair of the first XX conductors (C111) of the first X-coil (L11) is disposed in the second conductor layer, and the pair of the first XY conductors (C112) are both disposed in the first conductor layer.