Displacement Measurement Apparatus Using Spatial Frequency Correction

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Solution Overview

Problem

Conventional displacement measurement apparatuses face errors beyond optical magnification distortion, particularly when low-frequency components dominate the spatial frequency component of measurement target images, leading to increased measurement errors due to surface roughness, distance changes, and motion-related blurring or shaking.

Innovation Solution

A measurement apparatus that calculates measurement values using a cross-correlation function of two images and corrects these values based on the spatial frequency component configuration, employing a double-sided telecentric optical system and sub-pixel estimation with quadratic or linear function fitting to improve accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional displacement measurement methods are used, then measurement can be performed, but measurement precision deteriorates due to errors from low-frequency spatial components and surface roughness

Engineering Contradiction:
Improvemeasurement precisionVSAvoidmeasurement reliability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent changes the parameter of spatial frequency component selection by calculating the spatial frequency spectrum of the measurement target image and selecting only the high-frequency component range for correlation calculation. This parameter change filters out low-frequency components that cause measurement errors due to surface roughness and lighting conditions, thereby improving measurement precision and reliability simultaneously

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent extracts only the high-frequency spatial components from the measurement target image by calculating the spatial frequency spectrum and selecting a specific frequency range. This extraction removes the harmful low-frequency components that cause measurement errors, allowing accurate displacement measurement even on surfaces with roughness or under varying lighting conditions

Inventive Principle:
Principle #2Taking out (Extraction)

2Measurement precision

If optical magnification correction is applied, then distortion errors are reduced, but other errors from low-frequency components and measurement conditions remain uncorrected

Engineering Contradiction:
Improveoptical magnification accuracyVSAvoidoverall measurement reliability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent changes the approach from correcting optical magnification errors to selecting high-frequency spatial components for measurement. By calculating the spatial frequency spectrum and selecting only the high-frequency range, the method makes measurement results insensitive to optical distortion, low-frequency surface variations, and lighting changes, thereby improving overall measurement reliability beyond what magnification correction alone can achieve

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If measurement is performed on surfaces with varying roughness, then versatility is improved, but measurement precision deteriorates due to low-frequency component interference

Engineering Contradiction:
Improvesurface adaptabilityVSAvoidmeasurement precision
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent extracts only the high-frequency spatial components from measurement target images by calculating the spatial frequency spectrum and selecting a specific frequency range. This extraction removes the harmful low-frequency components that vary with surface roughness, lighting conditions, and measurement distance, enabling consistent high-precision measurement across diverse surfaces including rough, smooth, shiny, and matte surfaces

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the measurement parameter from using the full spatial frequency spectrum to using only the high-frequency component range. This parameter change makes the measurement process adaptable to various surface conditions because high-frequency components represent local texture and edge information that remains consistent across different surface types, while filtering out low-frequency variations caused by surface roughness and lighting

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces measurement errors by correcting for errors not related to optical magnification, specifically those caused by low-frequency components, resulting in improved precision and accuracy across varying surface roughness, distance, and speed conditions.

Implementation Method 1

obtains two image capturing signals by photoelectrically converting speckle distribution before and after motion

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Implementation Method 2

calculate a measurement value with respect to a measurement target by using a cross-correlation function of two images of the measurement target

Methodology Applied
Scientific EffectCross-correlation analysis:

Data Source

PatentUS20230196605A1Measurement apparatus, storage medium, system and method of manufacturing article
Publication Date: 2023.06.22 CANON KK
  • US20230196605A1 patent drawing
  • US20230196605A1 patent drawing
  • US20230196605A1 patent drawing

AI summary

To provide a measurement apparatus and the like that suppresses an error caused by an image used for measurement, and that enables measurement with a high accuracy, in a measurement apparatus, a measurement unit is configured to calculate a measurement value with respect to a measurement target by using a cross-correlation function of two images of the measurement target acquired by an image capturing element, and a correction unit is configured to correct the measurement value according to a configuration of a spatial frequency component of the two images.