Displacement Member Shutter for Electron Beam Column Contamination
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Solution Overview
Problem
Conventional composite charged particle beam apparatuses face difficulties in preventing samples from contacting the electron beam column due to human errors in sample attachment or selection, leading to potential contamination and operational challenges.
Innovation Solution
A charged particle beam apparatus with a displaceable displacement member and a contact portion that can detect sample contact, using actuators and electrical insulation to prevent sample contact with the electron beam column, while maintaining operational efficiency and cleanliness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a shutter is used to close the objective lens opening when irradiating with focused ion beam, then floating particles are prevented from adhering to the objective lens, but the device complexity increases due to additional components
Solution Approach 1:
The patent combines the shutter function and the sample holder function into a single integrated displacement member. This member can displace between an insertion position (blocking the objective lens opening) and a withdrawal position (allowing beam passage), while also serving as a sample holder that can contact the sample. This merging eliminates the need for separate shutter and sample holder components, reducing overall device complexity while maintaining the protective function.
Solution Approach 2:
The displacement member is designed with multi-functionality: it acts as both a shutter (blocking or allowing beam passage) and a sample holder (supporting and positioning the sample). The contact portion on this member can detect sample contact, providing an additional sensing function. This universal design reduces the number of components needed in the system.
2Adaptability or versatility
If different sample holders are used for different samples, then versatility is improved, but the ease of operation deteriorates due to difficulty in controlling different sample stage operations
Solution Approach 1:
The displacement member is designed as a universal sample holder that can accommodate different samples while maintaining consistent control operations. The integrated design with the shutter mechanism means that regardless of which sample is used, the same displacement and control procedures apply, simplifying operation while preserving versatility.
Solution Approach 2:
The contact portion on the displacement member provides feedback by detecting whether the sample is in contact with it. This feedback mechanism allows the system to automatically sense sample positioning status, eliminating the need for operators to manually track complex sample holder states. The detecting means (power source and electrical connection member) provides automated monitoring that simplifies operation across different sample types.
3Ease of operation
If the sample stage operates without protective measures, then ease of operation is maintained, but the reliability deteriorates due to risk of sample contact with electron beam column
Solution Approach 1:
The displacement member is positioned to displace between an insertion position (where it blocks the objective lens opening and prevents sample contact with the electron beam column) and a withdrawal position. This preliminary protective action is automatically in place before any potential harmful contact can occur, preventing contamination while maintaining simple operation through automated control.
Solution Approach 2:
The contact portion with detecting means provides real-time feedback on sample positioning. The power source applies voltage to the displacement member, and the electrical connection member detects conduction status to determine if the sample is in contact with the contact portion. This feedback system automatically monitors and alerts to potential contact situations, enhancing reliability without complicating operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents floating particles and sample contact with the electron beam column, ensuring accurate operation and reducing contamination risks even when human errors occur.
Implementation Method 1
an electrical connection member electrically connecting the sample and the sample chamber detects whether the sample is in contact with the contact portion based on whether there is conduction between the sample and the contact portion
Data Source
AI summary
A charged particle beam apparatus includes a sample chamber; a sample stage; an electron beam column for irradiating a sample with an electron beam; and a focused ion beam column for irradiating the sample with a focused ion beam. The apparatus includes a displacement member having an open/close portion displaceable between an insertion position between a beam emitting end portion of the electron beam column and the sample stage, and a withdrawal position away from the insertion position, and a contact portion provided at a contact position capable of contacting the sample before the beam emitting end portion during operation of the sample stage. A driving unit displaces the displacement member, and a conduction sensor detects whether the sample is in contact with the contact portion.