Display Chamber Pressure Feedback for Cleaning End-Point Control
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Solution Overview
Problem
Existing display apparatus manufacturing processes face challenges in accurately determining the end point of cleaning in the chamber, leading to inefficiencies and potential damage to components.
Innovation Solution
A display apparatus manufacturing apparatus and method that includes a chamber with a susceptor, a head unit for spraying cleaning gas, a pressure adjusting unit, and a control unit. The control unit calculates an opening ratio of a pressure adjusting valve and determines the end of cleaning when the hourly variation of the opening ratio is within a designated range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If cleaning gas is sprayed continuously in the chamber, then cleaning effectiveness is improved, but cleaning gas waste increases and components may be damaged
Solution Approach 1:
The system uses a pressure sensor to continuously monitor chamber pressure and feeds this information back to the control unit. The control unit calculates the opening ratio of the pressure adjusting valve based on the pressure deviation from the target value, dynamically adjusting the cleaning gas flow to maintain optimal cleaning effectiveness while preventing gas waste and component damage
Solution Approach 2:
The system dynamically changes the opening ratio parameter of the pressure adjusting valve during the cleaning process. By continuously adjusting this parameter based on real-time pressure measurements, the system optimizes cleaning gas flow rate to achieve effective cleaning while minimizing gas consumption and avoiding component damage from excessive gas flow
2Manufacturing precision
If cleaning process is extended to ensure complete cleaning, then cleaning quality is improved, but productivity decreases
Solution Approach 1:
The real-time pressure monitoring and feedback control system allows the cleaning process to be precisely terminated when the target pressure is achieved and maintained, ensuring complete cleaning without unnecessary extension of the cleaning time, thus maintaining high cleaning quality while improving productivity
Solution Approach 2:
The system replaces time-based cleaning control with pressure-based control. Instead of extending cleaning time to ensure completeness, the system uses pressure sensor data to objectively determine when cleaning is complete, enabling precise termination of the cleaning process and improving productivity without sacrificing cleaning quality
3Device complexity
If pressure control is simplified, then device complexity is reduced, but measurement precision of cleaning end point deteriorates
Solution Approach 1:
The system implements a feedback control mechanism where the pressure sensor continuously monitors chamber pressure and the control unit calculates the opening ratio based on pressure deviation from target. This feedback loop provides high measurement precision for end point determination while maintaining relatively simple device structure by using standard control components
Solution Approach 2:
The control unit automatically calculates the opening ratio and controls the pressure adjusting valve based on pressure sensor data without requiring complex external control systems. The system serves itself by using its own pressure measurements to automatically adjust and determine the cleaning end point, achieving high precision with minimal additional device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach improves the accuracy of determining the end point of cleaning, reducing waste of cleaning gas, minimizing damage to components, and enhancing productivity by ensuring complete and efficient cleaning processes.
Implementation Method 1
a pressure adjusting pump connected to the guide pipe and applying a designated pressure to the pipe flow path such that a gas in the chamber flows to an outside thereof
Implementation Method 2
a pressure adjusting valve connected to the guide pipe and opening or closing the pipe flow path such that the pressure in the chamber is within a designated range
Implementation Method 3
a head unit arranged in the chamber and spraying a cleaning gas into the chamber
Data Source
AI summary
A display apparatus manufacturing apparatus includes a chamber, a susceptor arranged in the chamber and supporting a display substrate, a head unit arranged in the chamber and spraying a cleaning gas into the chamber, a cleaning gas supply unit supplying the cleaning gas to the head unit, a pressure adjusting unit adjusting a pressure in the chamber, and a control unit determining an end point of cleaning.