Display Manufacturing Chamber Cleaning With Pressure-Controlled Radicals
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Solution Overview
Problem
Existing display apparatus manufacturing processes face challenges in efficiently cleaning deposition materials from chambers, leading to prolonged cleaning times and inefficiencies.
Innovation Solution
A device for manufacturing display apparatuses is designed with a first chamber and a second chamber, where a first controller adjusts the flow rates of materials in the second chamber, and a second controller controls the pressure adjuster to maintain a preset pressure range in the first chamber, facilitating effective cleaning by generating radicals that react with and remove deposition materials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the cleaning material is kept in the chamber for a sufficient residence time to ensure thorough cleaning, then the cleaning effectiveness is improved, but the total cleaning time duration increases
Solution Approach 1:
The cleaning process is divided into multiple stages: initial cleaning material injection, intermediate pressure adjustments with brief pauses, and final cleaning phases. The pressure adjuster creates segmented time intervals during which cleaning radicals are generated and allowed to act on deposition materials, then paused, and repeated. This segmentation allows thorough cleaning to occur in distributed time intervals rather than requiring one continuous long exposure, thereby improving cleaning effectiveness while managing total cleaning time.
Solution Approach 2:
The cleaning process employs periodic action through repeated cycles of cleaning material injection, pressure holding, brief pauses, and pressure adjustments. The controller automates this periodic sequence, where cleaning radicals are generated for a set duration, then the system pauses briefly, and the cycle repeats. This periodic approach ensures sufficient residence time for effective cleaning while preventing excessive total cleaning time by systematically alternating between active cleaning and pause intervals.
2Duration of action of moving object
If the pressure in the first chamber is maintained at a preset range during cleaning, then the residence time of cleaning material is improved, but the complexity of pressure control increases
Solution Approach 1:
The pressure adjuster is equipped with pressure sensors that continuously monitor the internal pressure of the first chamber. The controller receives real-time pressure feedback and automatically adjusts the opening degree of the pressure adjuster to maintain pressure within the preset range (1.5-2.5 Torr). This closed-loop feedback control ensures stable pressure conditions for optimal cleaning radical residence time without requiring manual intervention or complex external control systems.
Solution Approach 2:
The pressure adjuster system is designed to self-regulate pressure within the chamber through automated controller management. Once the preset pressure range and cleaning parameters are initially set, the system autonomously maintains optimal pressure conditions throughout the cleaning process by continuously adjusting the pressure adjuster opening degree based on real-time chamber conditions, eliminating the need for constant manual monitoring or adjustment.
3Productivity
If the flow rate of cleaning materials is increased to improve cleaning efficiency, then the cleaning speed is improved, but the pressure stability in the chamber deteriorates
Solution Approach 1:
The system dynamically adjusts the opening degree of the pressure adjuster in real-time based on the flow rate of cleaning materials and the current pressure conditions. When cleaning material flow rate increases to improve cleaning speed, the controller automatically modifies the pressure adjuster opening to compensate and maintain pressure stability within the preset range. This dynamic adjustment allows the system to operate at higher cleaning efficiencies without sacrificing pressure stability, as the pressure control adapts continuously to changing flow conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for a reduction in cleaning time by ensuring sufficient residence time for cleaning radicals, thereby enhancing the efficiency and effectiveness of the cleaning process.
Implementation Method 1
a second controller which controls the pressure adjuster... controls an opening rate of the pressure adjuster and maintains a pressure in the first chamber at a preset range
Implementation Method 2
The cleaning material may react with the deposition material remaining in a solid state to vaporize the deposition material
Implementation Method 3
the first controller... controls at least one of a flow rate of a first material flowing into the second chamber and a flow rate of a second material flowing into the second chamber
Data Source
AI summary
A device for manufacturing a display apparatus includes a first chamber, a second chamber connected to the first chamber, a first controller which controls the second chamber, a pressure adjuster connected to the first chamber, and a second controller which controls the pressure adjuster. The first controller, while a cleaning process of the first chamber is performed, controls at least one of a flow rate of a first material flowing into the second chamber and a flow rate of a second material flowing into the second chamber, and the second controller, while the cleaning process of the first chamber is performed, controls an opening rate of the pressure adjuster and maintains a pressure in the first chamber at a preset range.