Display Insulating Layer Concave Corner for CD Uniformity
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Solution Overview
Problem
In the manufacturing process of electronic devices, such as display devices, inconsistent etching depths of film layers lead to reduced critical dimension (CD) uniformity and increased risk of line breakage, resulting in low production yield.
Innovation Solution
The display device incorporates an insulating layer with a concave corner recessed toward the metal layer, achieved through two etching processes, which ensures excellent CD uniformity and reduces the risk of conductive wire breakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a single etching process is used to manufacture the insulating layer, then the manufacturing process is simple, but the etching depth is inconsistent leading to poor CD uniformity and line breakage
Solution Approach 1:
The single etching process is segmented into two distinct etching processes: a first etching process that etches the insulating layer to a first depth, and a second etching process that etches to a second depth greater than the first depth. This segmentation allows each etching process to be optimized independently, achieving consistent etching depths and good CD uniformity while preventing line breakage.
2Manufacturing precision
If a longer etching time or stronger etchant is used to achieve required etching depth, then the etching depth requirement is met, but other film layers are unintentionally etched causing line breakage
Solution Approach 1:
The first etching process is performed as a preliminary action to etch the insulating layer to a controlled first depth before the second etching process. This preliminary etching creates a staged approach where the second etching process can then achieve the final required depth without the need for excessively long etching times or strong etchants that would cause unintended damage to other film layers.
Solution Approach 2:
The etching process parameters are changed between two distinct stages: the first etching process uses specific parameters to achieve a first depth, and the second etching process uses different parameters to achieve a second depth. This parameter change approach allows precise control over etching depth at each stage, meeting the required etching depth while avoiding unintended etching damage to conductive wires and other sensitive structures.
3Manufacturing precision
If the insulating layer is etched to greater depth to expose the substrate, then the light transmitting region is achieved, but the metal layer is prone to unintended etching and lateral etching effect
Solution Approach 1:
The etching of the insulating layer to expose the substrate is segmented into two processes: the first etching process creates a first patterned insulating layer with a first depth, and the second etching process creates the final pattern with a greater second depth. This segmentation allows the metal layer to be protected during the first etching stage, and only the necessary portions are etched in the second stage, achieving the light transmitting region while maintaining conductive wire integrity.
Solution Approach 2:
Different etching parameters are used in the first and second etching processes to control the etching depth and lateral etching effects. The first etching process uses parameters optimized for initial insulating layer removal, while the second etching process uses parameters optimized for final depth achievement with minimal lateral etching. This parameter optimization ensures the light transmitting region is formed without causing metal layer damage or excessive lateral etching that would compromise conductive wire reliability.
Data Source
AI summary
A display device includes a substrate, an insulating layer and a metal layer. The substrate includes a light transmitting region. The insulating layer is disposed on the substrate and between the substrate and the metal layer. An edge of the insulating layer has a concave corner, and the concave corner is recessed toward the metal layer and located in the light transmitting region. A manufacturing method of the display device is also proposed.