Display Layer Contact-Hole Layout for Shorter TFT Processing
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Solution Overview
Problem
The existing process of producing display devices involves multiple processing steps for insulating films, particularly the first inorganic insulating film, leading to increased processing time and complexity.
Innovation Solution
The display device design includes specific configurations of conductive layers and insulating films, reducing the number of processing steps by integrating contact holes and overlapping layers to minimize the processing of the second insulating film.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple processing steps are performed for the first inorganic insulating film to form contact holes for TFT components and pixel electrodes, then the connectivity and functionality of the display device are improved, but the processing time and manufacturing complexity increase
Solution Approach 1:
The patent combines the formation of contact holes for TFT components and pixel electrodes into a single processing step. By forming the contact holes for both types of conductive layers simultaneously in the first inorganic insulating film, the patent eliminates the need for separate processing steps, thereby reducing total processing time while maintaining the required connectivity and functionality.
Solution Approach 2:
The first inorganic insulating film is designed to serve multiple functions: it provides insulation between conductive layers and simultaneously contains contact holes for both TFT components and pixel electrodes. This multi-functional design allows a single processing step to address multiple connectivity requirements, reducing the overall number of processing steps and time required.
2Reliability
If the first inorganic insulating film is made thick to ensure proper insulation and structural integrity, then the reliability and stability of the display device are improved, but the number of processing steps and processing time increase significantly
Solution Approach 1:
By merging the insulation function and contact hole formation into a single processing step for the first inorganic insulating film, the patent maintains the thickness required for proper insulation while eliminating additional processing steps. This approach ensures that the film remains thick enough for structural integrity and insulation performance without requiring separate processing operations.
Solution Approach 2:
The contact holes are formed in the first inorganic insulating film during its initial processing, before subsequent layers are deposited. This preliminary action allows the film to maintain its full thickness for insulation purposes while pre-establishing the necessary connectivity paths, avoiding the need for additional processing steps later.
3Manufacturing precision
If separate processing steps are used for forming contact holes in the first inorganic insulating film and collectively forming openings in the gate insulating film, first inorganic insulating film, second inorganic film, and organic film, then the precision and accuracy of each opening are improved, but the processing time and number of steps increase
Solution Approach 1:
The patent merges the formation of contact holes in the first inorganic insulating film with the collective formation of openings in the gate insulating film, first inorganic insulating film, second inorganic film, and organic film into a single processing step. This unified approach maintains alignment precision by using a single patterning operation while significantly reducing the number of processing steps and total processing time.
Solution Approach 2:
The processing step is designed to simultaneously create openings in multiple different films (gate insulating film, first inorganic insulating film, second inorganic film, and organic film) with a single operation. This multi-functional processing approach ensures consistent alignment precision across all films while eliminating the need for separate processing steps for each film layer.
Data Source
AI summary
In a display device, a switching component includes a first electrode being a portion of a first conductive film, a semiconductor section being a portion of a semiconductor film disposed above the first conductive film via a first insulating film, a second electrode being a portion of a second conductive film disposed above the semiconductor film, and a third electrode being a portion of the second conductive film. A first line is a portion of a third conductive film disposed above the second conductive film via a second insulating film. A first terminal includes a first terminal portion being a portion of the second conductive film and a second terminal portion being a portion of the third conductive film. The second insulating film includes a contact hole overlapping the first line and the second electrode and a contact hole overlapping the first and second terminal portions.