Display Deposition Equipment with Magnetic Mask-Edge Adhesion
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Solution Overview
Problem
Existing deposition equipment for display devices faces challenges in achieving strong adhesion between the edges of a mask and a substrate, which can lead to alignment issues and incomplete deposition of materials.
Innovation Solution
The deposition equipment includes a support plate with a mask, a holder, a clamp with auxiliary magnets, an electrostatic chuck, and a magnetic force provider with main magnets, allowing for enhanced adhesion by aligning and attracting the mask to the substrate using magnetic forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If conventional deposition equipment is used, then the device structure is simple, but the adhesion between mask edges and substrate is insufficient
Solution Approach 1:
The magnetic field generation is segmented into multiple independent magnets arranged in an array, with each magnet contributing to the overall magnetic force distribution. This allows targeted enhancement of adhesion at mask edges without requiring a complete redesign of the deposition system.
Solution Approach 2:
A magnetic field is introduced as an intermediary force field between the mask and substrate. The magnetic field acts as a mediator to enhance adhesion, allowing non-contact interaction that complements the physical contact between mask edges and substrate.
2Strength
If magnetic force provider is added to improve adhesion, then adhesion strength increases, but device complexity increases
Solution Approach 1:
The deposition source and magnetic force provider are merged into a single integrated apparatus. The magnetic force provider is positioned within or adjacent to the deposition source structure, allowing simultaneous delivery of deposition material and magnetic field without requiring separate independent systems.
Solution Approach 2:
The magnetic force provider serves multiple functions: enhancing adhesion between mask and substrate, preventing mask edge lifting, and maintaining precise alignment during deposition. This multi-functionality reduces the need for additional separate components.
3Manufacturing precision
If mask adhesion is improved, then deposition precision improves, but manufacturing complexity increases
Solution Approach 1:
The magnetic field is applied before and during the deposition process to pre-establish strong adhesion between the mask and substrate. This preliminary action prevents mask displacement or lifting that would otherwise occur during material deposition, ensuring precision without requiring complex post-alignment procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures accurate alignment and strong adhesion between the mask and substrate, preventing contact failures and ensuring precise deposition of materials on the substrate.
Implementation Method 1
a clamp disposed on the holder to be in line with the edge of the support plate, an electrostatic chuck disposed on the holder and having a first avoidance hole in line with the clamp and a magnetic force provider disposed on the electrostatic chuck and having a second avoidance hole in line with the clamp, wherein the clamp includes at least one auxiliary magnet disposed to overlap with the edge of the support plate
Implementation Method 2
the magnetic force provider includes at least one main magnet
Implementation Method 3
an electrostatic chuck disposed on the holder
Data Source
AI summary
Deposition equipment for a display device that can improve adhesion between edges of a mask and a substrate, includes a support plate, a mask on a center of the support plate, a holder disposed on an edge of the support plate to support the substrate, a clamp disposed on the holder to be in line with the edge of the support plate, an electrostatic chuck disposed on the holder and having a first avoidance hole disposed in line with the clamp and a magnetic force provider disposed on the electrostatic chuck and having a second avoidance hole disposed in line with the clamp, wherein the clamp includes at least one auxiliary magnet disposed to overlap with the edge of the support plate.