Display Deposition Mask Assembly With Reciprocating Magnetic Adhesion

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Solution Overview

Problem

The challenge in manufacturing display apparatuses is the non-uniform deposition of materials due to poor adhesion between the mask and substrate, leading to defects such as stains and mura (line defects) in the display.

Innovation Solution

A manufacturing apparatus is designed with a magnetic force portion comprising magnets that reciprocate in directions intersecting the mask assembly to ensure uniform adhesion between the mask and substrate, using a magnetic force that varies to maintain consistent contact and prevent sagging.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the mask and substrate are fixed in position during deposition, then the deposition process is simple, but the adhesion between mask and substrate is poor leading to non-uniform deposition

Engineering Contradiction:
Improvedeposition uniformityVSAvoidadhesion mechanism complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The mask assembly is made movable relative to the substrate through a driving mechanism. The mask assembly can move in the first direction (parallel to substrate surface) and second direction (perpendicular to substrate surface), transforming the static adhesion problem into a dynamic control problem. This allows the mask to maintain optimal contact with the substrate throughout the deposition process, ensuring uniform material deposition.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The driving mechanism operates periodically to move the mask assembly between different positions. The mask assembly moves to a first position during deposition and returns to a second position, creating periodic action that maintains consistent adhesion. This periodic movement ensures that the mask remains properly positioned relative to the substrate throughout the entire deposition cycle.

Inventive Principle:
Principle #19Periodic action

2Manufacturing precision

If the mask assembly is made movable to improve adhesion, then deposition uniformity improves, but the device complexity increases

Engineering Contradiction:
Improvedeposition uniformityVSAvoidmask assembly mechanism complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The mask assembly is equipped with a driving mechanism that enables movement in multiple directions. The first direction movement (parallel to substrate) and second direction movement (perpendicular to substrate) are independently controllable. This dynamic capability allows precise control of mask-substrate relative position, ensuring uniform adhesion and deposition without requiring overly complex fixed-position adjustment mechanisms.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The driving mechanism is divided into independent components: a first driving mechanism for movement in the first direction and a second driving mechanism for movement in the second direction. This segmentation allows each mechanism to be optimized independently, reducing overall system complexity while maintaining the ability to achieve uniform deposition through coordinated movement.

Inventive Principle:
Principle #1Segmentation

3Manufacturing precision

If the mask assembly moves in the first direction during deposition, then adhesion uniformity improves, but the deposition time increases

Engineering Contradiction:
Improveadhesion uniformityVSAvoiddeposition speed
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The mask assembly executes periodic movement cycles, moving to the first position during deposition and returning to the second position afterward. This periodic action allows the mask to maintain optimal adhesion contact during the critical deposition phase while minimizing the time spent in movement transitions. The periodic nature of the operation ensures that adhesion uniformity is maintained without excessive movement time impacting overall deposition efficiency.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The driving mechanism enables the mask assembly to dynamically adjust its position during the deposition process. By moving in the first direction when needed and remaining stationary when optimal for deposition, the system achieves uniform adhesion while minimizing unnecessary movement time. The dynamic control allows the mask to be stationary during high-speed deposition phases and move only when position adjustment is required for adhesion maintenance.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach ensures uniform deposition of materials on the substrate, preventing defects like stains and mura by maintaining consistent adhesion between the mask and substrate during the deposition process.

Implementation Method 1

a magnetic force portion including a plurality of magnets extending in a first direction parallel to the mask assembly and disposed on a side opposite to the first side of the display substrate. The magnetic force portion may reciprocate in a direction intersecting the first direction.

Methodology Applied
Scientific EffectMagnetic force: Magnetism

Data Source

PatentUS12398453B2Apparatus and method for manufacturing display apparatus
Publication Date: 2025.08.26 SAMSUNG DISPLAY CO LTD
  • US12398453B2 patent drawing
  • US12398453B2 patent drawing
  • US12398453B2 patent drawing

AI summary

An apparatus for manufacturing a display apparatus includes: a chamber; a mask assembly disposed in the chamber on a first side of a display substrate; a deposition source disposed to face the mask assembly and supplying a deposition material that passes through the mask assembly; and a magnetic force portion including a plurality of magnets extending in a first direction parallel to the mask assembly and disposed on a side opposite to the first side of the display substrate. The magnetic force portion reciprocates in a direction intersecting the first direction.