Display Electrode Passivation for Low Resistance and Corrosion Control
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Solution Overview
Problem
Existing display devices face challenges in maintaining the reliability and reducing the resistance of conductive layers while preventing corrosion, which affects the operating characteristics and longevity of the display.
Innovation Solution
The display device incorporates a substrate with specific layers including a first bottom electrode with exposed side surfaces covered by a passivation layer containing silicon nitride, silicon oxide, or silicon oxynitride, and additives like fluorine, chlorine, or sulfur, along with insulating layers to reduce resistance and protect against corrosion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conductive layer is used in the display device, then electrical conductivity is improved, but corrosion resistance deteriorates
Solution Approach 1:
A passivation layer is introduced as an intermediary between the conductive layer (first bottom electrode containing aluminum or copper) and the environment. This passivation layer contains silicon nitride, silicon oxide, or silicon oxynitride with added fluorine, chlorine, carbon, or sulfur, which acts as a protective barrier that prevents corrosion of the conductive layer while allowing the device to maintain its electrical conductivity functions.
Solution Approach 2:
The passivation layer is formed as a composite material combining silicon-based compounds (silicon nitride, silicon oxide, or silicon oxynitride) with additional elements (fluorine, chlorine, carbon, or sulfur). This composite structure provides enhanced corrosion resistance compared to simple silicon-based layers, while maintaining the necessary electrical insulation properties to protect the underlying conductive layer.
2Reliability
If the conductive layer thickness is reduced to lower resistance, then electrical performance is improved, but mechanical strength and corrosion resistance deteriorate
Solution Approach 1:
The patent optimizes the thickness parameter of the passivation layer to be 100 Å or less. By controlling the thickness parameter within this range, the device achieves low electrical resistance while maintaining adequate mechanical strength and corrosion resistance. The thin passivation layer provides sufficient protection without adding excessive resistance or mechanical weakness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the reliability and operating characteristics of the display device by reducing conductive layer resistance and preventing corrosion, thereby improving the overall performance and longevity.
Implementation Method 1
a first passivation layer covering the exposed side surface of the first metal layer, and containing at least one of silicon nitride, silicon oxide, and silicon oxynitride, and a first additive
Implementation Method 2
a concentration of fluorine, chlorine, carbon, or sulfur contained in the first passivation layer may be equal to or greater than about 2.5 times a concentration of fluorine, chlorine, carbon, or sulfur contained in the first insulating layer
Data Source
AI summary
A display device according to an embodiment includes a substrate, a first bottom electrode disposed on the substrate, a first passivation layer disposed on the first bottom electrode, and containing at least one of silicon nitride, silicon oxide, and silicon oxynitride, and a first additive, a first insulating layer disposed on the first passivation layer, an active layer disposed on the first insulating layer, and containing an oxide semiconductor, a gate insulating layer disposed on the active layer, a gate electrode disposed on the gate insulating layer, and a second insulating layer disposed on the gate electrode. The first bottom electrode includes a first metal layer and a second metal layer disposed on the first metal layer and exposing a side surface of the first metal layer, and the first passivation layer covers the exposed side surface of the first metal layer.