Device and method for manufacturing display apparatus
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Solution Overview
Problem
Existing display apparatus manufacturing processes face challenges in efficiently forming and integrating inorganic and organic films within a thin-film encapsulation layer, particularly due to the need for separate chambers and complex alignment and deposition processes.
Innovation Solution
A device and method utilizing a chamber with distinct zones for inorganic and organic film deposition, where a susceptor and masks align and deposit films sequentially, allowing for the formation of inorganic and organic films in a single chamber, reducing facility costs and manufacturing time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If separate chambers are used for inorganic and organic film deposition, then film deposition quality is maintained, but manufacturing complexity and time increase
Solution Approach 1:
The patent combines the inorganic film deposition chamber and organic film deposition chamber into a single integrated chamber. The chamber is divided into a first deposition region for inorganic films and a second deposition region for organic films, allowing both types of films to be deposited sequentially without moving the substrate between chambers. This merging approach maintains film deposition quality while reducing manufacturing process complexity and time.
2Reliability
If separate chambers are used for inorganic and organic film deposition, then contamination is prevented, but manufacturing time increases
Solution Approach 1:
The single deposition chamber is segmented into distinct first and second deposition regions. The first deposition region is dedicated to inorganic film deposition and the second deposition region is dedicated to organic film deposition. This segmentation allows contamination prevention through spatial separation while maintaining short manufacturing time by eliminating the need to move substrates between separate chambers.
3Manufacturing precision
If multiple chambers are used, then film deposition control is improved, but facility cost increases
Solution Approach 1:
The patent merges multiple deposition chambers into a single integrated chamber with distinct deposition regions. This approach maintains precise control over film deposition processes for both inorganic and organic films while significantly reducing facility costs by eliminating the need for multiple separate chambers and associated infrastructure.
4Manufacturing precision
If substrate is moved between chambers, then deposition conditions are optimized, but process time increases
Solution Approach 1:
The deposition chamber is segmented into multiple specialized regions (first deposition region for inorganic films, second deposition region for organic films) that can be optimally configured for their respective deposition processes. The substrate remains stationary within the chamber, allowing each region to provide optimized deposition conditions without requiring substrate movement between chambers, thus reducing process time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and cost-effective formation of inorganic and organic films for the thin-film encapsulation layer, simplifying the manufacturing process and reducing the need for multiple chambers, thereby improving the quality and efficiency of display apparatus production.
Implementation Method 1
The inorganic film or the organic film may be formed by depositing the organic material or the inorganic material on the substrate in a chamber
Implementation Method 2
The inorganic film or the organic film may be formed by depositing the organic material or the inorganic material on the substrate in a chamber
Data Source
AI summary
A device for manufacturing a display apparatus includes a chamber including a first zone, a second zone, and a third zone arranged along a linear path, an inorganic film deposition mask disposed in the first zone, an organic film deposition mask disposed in the second zone, a deposition unit disposed in the third zone, and a susceptor which reciprocates between the first zone, the second zone, and the third zone.