Display Device Hydrogen Barrier Layer Stabilizes Transistor Characteristics
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Solution Overview
Problem
Existing display devices face challenges in maintaining consistent electrical characteristics of transistors due to hydrogen diffusion through contact holes, leading to variations in display quality and performance.
Innovation Solution
Incorporating a hydrogen barrier material or a hydrogen barrier layer in the third conductive layer to prevent hydrogen diffusion, and spacing the second contact hole apart from the first contact hole to remove hydrogen diffusion paths, thereby stabilizing the semiconductor layer's hydrogenation level.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If contact holes are formed to connect conductive layers to the semiconductor layer, then electrical connection is achieved, but hydrogen diffusion occurs through the contact holes causing variations in transistor electrical characteristics
Solution Approach 1:
A hydrogen barrier layer is introduced as an intermediary between the contact hole and the semiconductor layer. This barrier layer specifically blocks hydrogen diffusion while allowing the electrical connection through the contact hole to remain functional, thus preventing the harmful effect without compromising the electrical connection.
Solution Approach 2:
The structure employs composite materials by combining the conductive layer with a hydrogen barrier layer having different material properties. The barrier layer is specifically selected to have hydrogen-blocking characteristics while maintaining compatibility with the surrounding structures, creating a composite system that addresses both electrical connection and hydrogen prevention needs.
2Adaptability or versatility
If multiple insulating layers and conductive layers are stacked to achieve complex circuit functionality, then device functionality is improved, but the complexity of the device structure increases
Solution Approach 1:
The hydrogen barrier layer serves multiple functions simultaneously: it acts as a hydrogen diffusion barrier, provides structural support in the stacked configuration, and maintains electrical isolation where needed. This multi-functionality reduces the need for additional separate layers, thereby managing complexity while preserving circuit functionality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively limits variations in transistor electrical characteristics and improves display quality by preventing hydrogen-induced changes, ensuring consistent performance.
Implementation Method 1
hydrogen diffusion through contact holes
Implementation Method 2
stabilizing the semiconductor layer's hydrogenation level
Data Source
AI summary
A display device includes a substrate, a semiconductor layer on the substrate, a first insulating layer on the semiconductor layer, a first conductive layer on the semiconductor layer, a second insulating layer on the first conductive layer, a first contact hole penetrating the first insulating layer and the second insulating layer, a second conductive layer on the second insulating layer, connected to the semiconductor layer through the first contact hole, and including a hydrogen barrier material, and a third insulating layer on the second conductive layer.