Display Device Laser Patterning for Substrate Damage Reduction
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Solution Overview
Problem
Existing display device manufacturing methods cause damage to substrates during the formation of metal patterns, leading to reduced reliability.
Innovation Solution
A manufacturing method involving a preliminary metal layer with non-uniform thickness is used, where a mold is applied to form metal patterns with a flat upper surface, and laser irradiation is employed to create sub-metal patterns with different thicknesses, minimizing substrate damage and enhancing reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional metal pattern formation methods are used, then manufacturing process is simple, but substrate damage occurs and reliability decreases
Solution Approach 1:
A preliminary metal layer is formed before the final metal pattern formation. This preliminary layer serves as a protective cushion that absorbs the harmful effects of laser irradiation and prevents direct damage to the substrate during subsequent processing steps.
Solution Approach 2:
The preliminary metal layer acts as a cushioning layer positioned between the laser processing zone and the substrate. It absorbs excess energy and mechanical stress from laser irradiation, thereby protecting the substrate from damage while enabling reliable metal pattern formation.
2Manufacturing precision
If metal patterns with varying thickness are formed, then electrical connection performance is improved, but manufacturing complexity increases
Solution Approach 1:
The metal patterns are designed with different thicknesses in different regions: a first thickness in areas requiring strong electrical connection (overlapping electrodes) and a second thickness in other areas. This local variation optimizes electrical performance while the preliminary layer simplifies the manufacturing process.
Solution Approach 2:
The manufacturing process utilizes controlled laser irradiation parameters to achieve different metal layer thicknesses. By adjusting laser power, scanning speed, and irradiation areas, the process forms both thin and thick metal regions in a single step, managing complexity through parameter control rather than multiple processing steps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method forms metal patterns with a flat upper surface, reducing substrate damage and improving the reliability of the display device.
Implementation Method 1
irradiating a laser to a first portion of the metal layer, the first portion of the metal layer not overlapping the pad electrodes and the bump electrodes, to form a plurality of metal patterns
Implementation Method 2
The mold is configured to transmit a light having a wavelength equal to or greater than about 350 nm and equal to or smaller than about 450 nm
Data Source
AI summary
A manufacturing method of a display device includes providing a plurality of pad electrodes exposed through an opening defined through a base layer and arranged in a first direction and a plurality of bump electrodes on the pad electrodes overlapping the pad electrodes, respectively, when viewed in a plane, placing a preliminary metal layer having a substantially non-uniform thickness in a second direction intersecting the first direction on the pad electrodes and the bump electrodes, placing a mold on the preliminary metal layer to form a metal layer with a flat upper surface, and irradiating a laser to a first portion of the metal layer, the first portion of the metal layer not overlapping the pad electrodes and the bump electrodes, to form a plurality of metal patterns. The pad electrodes are electrically connected to the bump electrodes by (via) the metal patterns.