Display Mask Holder Cooling to Prevent Deposition Deformation
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Solution Overview
Problem
Existing display apparatus manufacturing processes face challenges in efficiently cooling the mask assembly during deposition, which can lead to deformation and reduced durability of the mask assembly.
Innovation Solution
The apparatus includes a holder part with a cooling passage system that allows for the circulation of a cooling material, enabling efficient cooling of the mask assembly by moving between support and contact positions, thereby maintaining the mask assembly's integrity and improving the quality of the display apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the mask assembly is used in the deposition process without efficient cooling, then the deposition process can be completed, but the mask assembly experiences heat-induced deformation and reduced durability
Solution Approach 1:
A cooling material is introduced as an intermediary substance that flows through cooling passages within the mask assembly structure. This cooling material acts as a heat transfer medium, absorbing thermal energy from the mask assembly during the deposition process and carrying it away, thereby maintaining the mask assembly at a safe operating temperature and preventing thermal deformation and durability issues
Solution Approach 2:
The patent implements a hydraulic cooling system where cooling material is circulated through dedicated cooling passages embedded in the mask assembly holder and mask assembly components. This fluid-based thermal management system efficiently removes heat generated during the deposition process, solving the contradiction between maintaining operational reliability and controlling temperature rise
2Reliability
If a cooling system is added to the mask assembly, then the mask assembly durability is improved, but the device complexity increases
Solution Approach 1:
The cooling passages are integrated directly into the existing mask assembly holder and mask assembly structures, merging the cooling function with the structural components. This integration approach eliminates the need for separate, standalone cooling apparatus, thereby improving mask assembly durability while minimizing the increase in overall device complexity
Solution Approach 2:
The mask assembly holder and related components are designed to serve multiple functions: they provide structural support for the mask assembly while simultaneously housing the cooling passages for thermal management. This multi-functionality reduces the need for additional dedicated cooling components, thus improving reliability without proportionally increasing device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The cooling system effectively reduces heat-induced deformation of the mask assembly, enhancing the durability and quality of the manufactured display apparatus.
Implementation Method 1
a cooling passage through which a cooling material flows
Implementation Method 2
flowing a cooling material through a cooling passage disposed inside a holder part
Data Source
AI summary
An apparatus for manufacturing a display apparatus includes a chamber, a mask assembly disposed inside the chamber to face a display substrate, a holder part disposed inside the chamber, the holder part including a cooling passage through which a cooling material flows, and a deposition source disposed inside the chamber and configured to supply a deposition material such that the deposition material passes through the mask assembly and is deposited on the display substrate. At least one of the holder part and the mask assembly is movable between a first position at which the holder part supports the display substrate and a second position at which the holder part is in contact with the mask assembly.