Display Mask Assembly Layout for Stable Deposition Precision
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Solution Overview
Problem
The deposition quality of materials in display apparatus manufacturing is compromised due to transformation of the mask sheet's shape during the deposition process, leading to uneven material distribution on the substrate.
Innovation Solution
A mask assembly is designed with a mask frame and sheet where the openings are formed using a combination of wet-etching and laser-etching techniques, with the first group of openings formed in the center and the second group formed in a surrounding area using laser-etching to prevent shape transformation and improve precision, ensuring accurate deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a single etching method is used to form openings in the mask sheet, then the manufacturing process is simple, but the precision and shape integrity of the openings are compromised
Solution Approach 1:
The etching process is segmented into two distinct methods: wet-etching for the first group of openings (central pixel regions) and laser-etching for the second group of openings (peripheral pixel regions). This segmentation allows each etching method to be optimized for its specific application, with wet-etching providing sufficient precision for central areas and laser-etching providing superior precision for peripheral areas where shape transformation is more problematic.
Solution Approach 2:
Different etching methods are applied to different regions of the mask sheet based on local requirements. The central region (first area) uses wet-etching while the peripheral region (second area) uses laser-etching. This local differentiation ensures that each region receives the appropriate etching treatment to maintain opening precision and prevent shape transformation in areas where it is most critical.
2Manufacturing precision
If the mask sheet is not tensioned during the deposition process, then the mask assembly is easier to assemble, but the shape of the openings transforms leading to poor deposition quality
Solution Approach 1:
The mask sheet is pre-tensioned and fixed to the mask frame before the deposition process begins. This preliminary action of tensioning the mask sheet prevents shape transformation during deposition, ensuring that the openings maintain their intended geometry and that deposition quality is preserved throughout the manufacturing process.
3Manufacturing precision
If only central openings are formed in the mask sheet, then the manufacturing process is simpler, but shadow phenomena occur affecting deposition uniformity
Solution Approach 1:
The openings in the mask sheet are segmented into two groups: a first group of openings (510) formed in the central first area and a second group of openings (520) formed in the peripheral second area. This segmentation eliminates shadow phenomena by ensuring uniform deposition across the entire substrate surface, while the automated laser-etching process maintains manufacturing efficiency despite the increased number of openings.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enhances the deposition quality by maintaining the shape integrity of the mask sheet, reducing shadow phenomena, and improving the precision and efficiency of the manufacturing process.
Implementation Method 1
forming an opening of a second group in a second area of the mask sheet... The forming of the opening of the second group may include laser-etching the second area
Implementation Method 2
The forming of the opening of the first group may include wet-etching the first area... The forming of the opening of the second group may include performing wet-etching to form a temporary opening
Implementation Method 3
a deposition material may be deposited to form multiple layers of a display apparatus. For example, the deposition material from a deposition source may be sprayed and deposited on a substrate through a mask assembly
Data Source
AI summary
A method of manufacturing a mask assembly includes preparing a mask frame including an opening area, forming an opening of a first group in a first area of a center of a mask sheet, tensioning and fixing the mask sheet to the mask frame, and forming an opening of a second group in a second area of the mask sheet. The second area surrounds the first area.