Display Mask Cell Opening Machining Under Stretch Tension

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Solution Overview

Problem

Existing mask manufacturing processes face challenges in achieving precise machining of cell openings and reducing dead space, leading to potential defects in display panels due to high tensile forces and deformation during the deposition process.

Innovation Solution

The method involves preliminary machining of cell openings on a stretched mask sheet, followed by laser beam machining, and the use of slit openings to further reduce tensile forces, with electrostatic chucks and shielding members to enhance precision and prevent deformation, resulting in improved machining precision and reduced dead space.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If laser beam machining is performed on a stretched mask sheet without preliminary machining, then cell openings can be formed directly, but high tensile forces cause deformation and reduced machining precision

Engineering Contradiction:
Improvecell opening precisionVSAvoidtensile force
Core Design Contradiction:
Manufacturing precisionVSForce

Solution Approach 1:

Preliminary cell openings are formed in the mask sheet before the stretching process. This preliminary action reduces the tensile force during subsequent laser beam machining by pre-relieving stress concentrations, thereby improving machining precision while accounting for the expected deformation from stretching

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The cell opening formation process is divided into two stages: preliminary machining to create initial openings, and final laser beam machining to achieve precise dimensions. This segmentation allows each stage to address specific requirements, with the first stage reducing tensile forces and the second stage achieving final precision

Inventive Principle:
Principle #1Segmentation

2Reliability

If cell openings are formed without preliminary openings, then the process is simpler, but dead space is increased and deposition reliability is reduced

Engineering Contradiction:
Improvedeposition process reliabilityVSAvoidmask manufacturing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

Preliminary cell openings are formed and then removed during the final laser beam machining process. This preliminary action creates a template that guides the final machining, ensuring precise cell opening formation while reducing dead space and improving deposition reliability

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The preliminary cell openings serve as temporary structures that are discarded during the final machining process. These temporary openings facilitate the removal of material and reduce dead space, with the understanding that they will be removed to achieve the final precise cell opening geometry

Inventive Principle:
Principle #34Discarding and recovering

3Shape

If the mask sheet is stretched tightly to improve flatness, then deposition uniformity improves, but tensile forces increase causing cell opening deformation

Engineering Contradiction:
Improvemask sheet flatnessVSAvoidcell opening dimensional precision
Core Design Contradiction:
ShapeVSManufacturing precision

Solution Approach 1:

Preliminary cell openings are formed before the mask sheet is stretched and fixed to the frame. This timing allows the preliminary openings to account for the deformation that will occur during stretching, so that the final laser beam machining can achieve precise dimensions despite the tensile forces applied during stretching

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the precision of cell openings, reduces deformation, and minimizes dead space, leading to more reliable mask deposition processes and improved display panel quality.

Implementation Method 1

The forming of the cell openings may include emitting a laser beam onto the mask sheet fixed to the frame

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

The mask manufacturing method may further include locating an electrostatic chuck on the mask sheet fixed to the frame between the fixing of the mask sheet to the frame and the forming of the cell openings

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Data Source

PatentUS11951507B2Mask
Publication Date: 2024.04.09 SAMSUNG DISPLAY CO LTD
  • US11951507B2 patent drawing
  • US11951507B2 patent drawing
  • US11951507B2 patent drawing

AI summary

Provided is a mask manufacturing method which includes preparing a mask sheet and a frame, stretching the mask sheet, and fixing the stretched mask sheet to the frame, and forming cell openings in the mask sheet fixed to the frame.