Multi-Layer Encapsulation for Display Sealing
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Solution Overview
Problem
The challenge in manufacturing display devices is to enhance the sealing function while reducing the number of processes, particularly to prevent external moisture and oxygen intrusion, which affects the reliability and image quality of flat panel displays.
Innovation Solution
A method involving the formation of a multi-layer encapsulation structure, where a first inorganic layer, a second organic/inorganic composite layer, and a third inorganic layer are deposited with specific intervals, allowing the edges of the layers to contact each other and the substrate, forming a robust seal around an organic light-emitting device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single encapsulation layer is formed, then the manufacturing process is simple, but the sealing function is insufficient and moisture/oxygen can intrude through side surfaces
Solution Approach 1:
The encapsulation structure is divided into three distinct layers: a first inorganic layer, a second organic/inorganic composite layer, and a third inorganic layer. Each layer serves specific sealing functions, with the inorganic layers providing barrier properties and the organic layer providing flexibility and stress relief, collectively preventing moisture and oxygen intrusion through side surfaces
Solution Approach 2:
The second layer uses organic and/or inorganic composite materials (such as HMDSO, HMDSN, TMDSO, TEOS, OMCTS, or TOMCTS) combined with inorganic materials (such as SiNx, SiOx, SiON, SiCN, TiOx, WOx, SiOxCy, or SiOxCyHz) in the first and third layers, creating a composite encapsulation structure that combines the advantages of different material properties for enhanced sealing
2Reliability
If multiple encapsulation layers with different materials are formed, then the sealing efficiency is improved, but the number of manufacturing processes increases
Solution Approach 1:
The formation of the first layer, second layer, and third layer is merged into a single manufacturing process step, where all three layers are deposited simultaneously or in sequence without requiring separate process chambers or mask changes, thereby improving sealing efficiency while maintaining manufacturing productivity
Solution Approach 2:
The same mask is used for forming all three encapsulation layers, and the process can be performed in the same chamber, making the manufacturing process universal and multi-functional. This approach allows the formation of complex multi-layer structures using a single process setup, reducing the number of required processes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach improves the sealing efficiency, reduces the complexity of the manufacturing process, and enhances the reliability of the display device by effectively preventing moisture and oxygen intrusion through the side surfaces, thereby maintaining image quality and reducing costs.
Implementation Method 1
forming a first layer covering the display portion; forming a second layer on the first layer; and forming a third layer on the second layer
Data Source
AI summary
A method of manufacturing a display device includes forming a display portion on a substrate, and forming an encapsulation portion for sealing the display portion. The forming of the encapsulation portion includes forming a first layer covering the display portion, forming a second layer on the first layer, and forming a third layer on the second layer. The first layer is formed by maintaining a distance between an upper surface of the display portion and a mask by a first interval. The second layer is formed by maintaining a distance between an upper surface of the first layer and the mask by a second interval that is different from the first interval. The third layer is formed by maintaining a distance between an upper surface of the second layer and the mask by a third interval that is different from the second interval.