Display Panel Electrode Layout for Fewer TFT Array Masks
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Solution Overview
Problem
The manufacturing process of thin film transistor array substrates requires multiple masks, leading to high production costs and complexity due to the need for numerous photo-lithography processes.
Innovation Solution
A display panel design that integrates the first electrode and second electrode in the same film layer, reducing the number of masks required and allowing them to function as both a pixel electrode or anode and source/drain, along with the use of inorganic insulating materials for forming multiple layers in a single mask.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple masks are used in the manufacturing process of thin film transistor array substrate, then the manufacturing precision and pattern definition are improved, but the production cost and process complexity increase significantly
Solution Approach 1:
The patent merges the pixel electrode and anode into a single conductive layer, allowing both structures to be formed simultaneously in one photolithography process rather than requiring separate masks. This integration reduces the total number of masks needed while maintaining the functional distinction between pixel electrodes and anodes through selective connection to the active layer.
Solution Approach 2:
The conductive layer serves multiple functions: it forms both the pixel electrode structure and the anode structure, and also provides electrical connection to the active layer. This multi-functional design eliminates the need for separate dedicated layers for each function, reducing overall process complexity.
2Manufacturing precision
If multiple masks are used in the manufacturing process of thin film transistor array substrate, then the pattern accuracy is improved, but the production cost increases
Solution Approach 1:
The patent combines the formation of pixel electrodes and anodes into a single photolithography step using one mask, thereby reducing mask-related costs while maintaining pattern accuracy through optimized mask design that accounts for both structures.
Solution Approach 2:
The patent performs preliminary design of the mask pattern to simultaneously define both pixel electrode and anode regions in advance, allowing a single photolithography process to achieve what would otherwise require multiple sequential steps, thus reducing production cost.
3Adaptability or versatility
If separate layers are used for pixel electrode and anode, then the functional distinction is clear, but the number of manufacturing steps increases
Solution Approach 1:
The patent merges the pixel electrode and anode into the same conductive layer while maintaining their functional distinction through selective electrical connections to the active layer. This approach increases manufacturing efficiency by reducing the number of deposition and patterning steps required.
Solution Approach 2:
The patent applies local quality by creating different electrical connection characteristics within the same conductive layer: some regions connect to the active layer to form pixel electrodes, while other regions connect to form anodes. This allows functional distinction without requiring separate layers.
Data Source
AI summary
A display panel, a manufacturing method thereof, and a display device are provided. The display panel includes a substrate, a first conductive layer, an active layer and a second conductive layer. The first conductive layer is disposed on the substrate, and the first conductive layer includes a data line. The active layer is disposed on a side of the first conductive layer away from the substrate, and the active layer includes a channel portion, and a first contacting portion and a second contacting portion. The second conductive layer is disposed on a side of the active layer away from the first conductive layer. The second conductive layer includes a first electrode and a second electrode, the first electrode connects the first contacting portion and the data line, the second electrode is connected to the second contacting portion, and the second electrode includes a pixel electrode or an anode.