Display Panel Insulating Film Cutoff for Maskless Etching

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Solution Overview

Problem

The existing flat panel display manufacturing process is lengthy and costly, requiring multiple mask exposure steps for each film layer, which hinders production capacity and increases costs.

Innovation Solution

A display panel design where insulating films are cut off at specific cutoff positions in the non-display region, allowing one film to act as a mask for etching another, thereby eliminating the need for additional masks and simplifying the manufacturing process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If multiple mask exposure steps are used to form each film layer, then manufacturing precision is improved, but device complexity and manufacturing cost increase

Engineering Contradiction:
Improvefilm layer formation precisionVSAvoidprocess flow complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent applies the self-service principle by making the insulating film serve dual purposes: both as a functional insulating layer and as a mask for etching adjacent film layers. The insulating film is extended into the non-display region and patterned to act as its own masking structure, eliminating the need for separate mask layers. This self-service approach reduces process complexity while maintaining manufacturing precision.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The insulating film is designed to perform multiple functions: providing electrical insulation, serving as an etch mask for adjacent layers, and defining pattern boundaries. By making the insulating film multi-functional, the patent eliminates the need for separate mask exposure steps, thereby reducing device complexity and manufacturing cost while maintaining precision.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Manufacturing precision

If multiple mask exposure steps are used for each film layer, then manufacturing precision is improved, but productivity decreases

Engineering Contradiction:
Improvefilm layer formation precisionVSAvoidproduction capacity
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The insulating film serves as its own mask, eliminating the need for separate mask exposure steps. This self-service mechanism reduces the number of processing steps required, thereby improving productivity and production capacity while maintaining the necessary manufacturing precision through the integrated design.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent merges the insulating film formation step with the mask creation step into a single integrated process. By combining these two functions into one step, the overall process time is reduced, improving productivity without sacrificing the precision needed for film layer formation.

Inventive Principle:
Principle #5Merging (Combining)

3Manufacturing precision

If specialized masks are used for etching, then manufacturing precision is improved, but manufacturing cost increases

Engineering Contradiction:
Improveetching precisionVSAvoidmanufacturing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The insulating film serves as its own etch mask, eliminating the need for specialized mask materials and processes. This self-service approach reduces manufacturing cost by removing the need for additional mask layer deposition and removal steps, while maintaining etching precision through the insulating film's inherent pattern definition capabilities.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent extracts the mask function from separate specialized mask layers and integrates it into the insulating film itself. This extraction eliminates the need for additional mask materials and processing steps, reducing manufacturing cost while preserving etching precision through the insulating film's patterned structure.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces the process flow, enhances production capacity, and lowers manufacturing costs by eliminating the need for specialized masks, while also providing effective sealing to prevent vapor and oxygen ingress.

Implementation Method 1

At least part of the first initial film in the non-display region is etched and removed to form the first insulating film

Methodology Applied
Scientific EffectEtching:

Data Source

PatentUS12532642B2Display panel and manufacturing method thereof, and display device
Publication Date: 2026.01.20 SHANGHAI TIANMA MICRO ELECTRONICS CO LTD
  • US12532642B2 patent drawing
  • US12532642B2 patent drawing
  • US12532642B2 patent drawing

AI summary

Provided are a display panel and a manufacturing method thereof, and a display device, relating to the field of display technology. The display panel includes a display region and a non-display region. The non-display region is located at the periphery of the display region. The display panel includes a substrate, a first insulating film, and a second insulating film. The first insulating film is located in the display region and the non-display region and located on a side of the substrate. The edge of the first insulating film is located at a first cutoff position in the non-display region. The second insulating film is located in the display region and the non-display region and located on a side of the first insulating film facing away from the substrate. The edge of the second insulating film is located at the first cutoff position.