Display Panel Metal Wire Group Etching Drainage
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Solution Overview
Problem
The manufacturing of display panels faces issues with metal residue and electrostatic discharge due to different etching rates of metals in multi-layered electrode structures, leading to reduced yield and stability problems.
Innovation Solution
A manufacturing method that includes forming specific patterns of metal wire groups on the peripheral regions of the substrate to guide etching solutions, preventing large metal residue formation and electrostatic discharge by creating drainage channels during the etching process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multi-layered metal structure (aluminum/copper laminated with molybdenum/titanium) is used for gate electrodes or data electrodes, then corrosion resistance is improved, but etching uniformity deteriorates due to different etching rates of different metals
Solution Approach 1:
The patent segments the metal layer into two functional zones: a first metal layer (aluminum or copper) in the display region that requires precise pattern formation, and a second metal layer (molybdenum or titanium) in the peripheral region that provides corrosion resistance and serves as an etching barrier. This segmentation allows each zone to be optimized independently for its specific function.
Solution Approach 2:
The patent applies different metal materials to different spatial locations: the display region uses aluminum or copper for good electrical conductivity and pattern definition, while the peripheral region uses molybdenum or titanium for corrosion resistance and etching control. This local differentiation resolves the contradiction by giving each region the material properties it needs.
2Area of stationary object
If large area metal etching is performed in peripheral region, then electrode coverage is improved, but metal residue increases leading to electrostatic discharge phenomenon
Solution Approach 1:
The patent performs preliminary action by forming the second metal layer (molybdenum or titanium) in the peripheral region before the etching process. This pre-formed barrier layer prevents metal residue formation during subsequent etching operations, eliminating the source of electrostatic discharge problems while maintaining adequate electrode coverage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method significantly reduces electrostatic discharge occurrences and improves the yield of display panels by ensuring uniform etching and minimizing metal residue, enhancing the manufacturing efficiency.
Implementation Method 1
exposing and developing the first half-finished plate to form a second half-finished plate
Implementation Method 2
etching and stripping the second half-finished plate to form a first preset metal wire group
Data Source
AI summary
A manufacturing method of a display panel disclosed by the invention includes: providing a substrate, the substrate having a first metal layer disposed thereon, the substrate including a first display region and a first peripheral region, the first metal layer covering the first display region and the first peripheral region; laying a photoresist layer on the first metal layer to form a first half-finished plate; exposing and developing the first half-finished plate to form a second half-finished plate with first and second preset patterns; etching and stripping the second half-finished plate to form a first preset metal wire group on the first display region and form a second preset metal wire group on the first peripheral region. The invention can significantly reduce the occurrence of electrostatic discharge phenomenon during the manufacturing process of a display panel and thus the yield of the display panel can be greatly improved.