Display Device Self-Aligned Patterning Without Fine Metal Masks

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Solution Overview

Problem

Current display devices face challenges in achieving high luminance, high resolution, and high reliability, particularly in manufacturing processes that require precise patterning of light-emitting layers without using fine metal masks, which can lead to deviations in shape and position, reduced thickness, and decreased manufacturing yield.

Innovation Solution

The proposed solution involves a display device structure with multiple light-emitting devices and an insulating layer, where each light-emitting device has a specific conductive layer configuration and an organic insulating material, and a manufacturing method that uses photolithography without a shadow mask to form island-shaped light-emitting layers, ensuring precise alignment and reduced damage during processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If fine metal masks are used for patterning light-emitting layers, then manufacturing precision can be achieved, but device complexity increases and manufacturing yield decreases due to deviations in shape and position

Engineering Contradiction:
Improvepatterning precisionVSAvoidmanufacturing process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent removes the fine metal mask from the manufacturing process entirely, extracting the problematic element that caused deviations in shape and position. Instead of using photolithography with metal masks, the invention employs a self-aligned patterning method where the light-emitting layer is directly patterned based on the pixel electrode pattern, eliminating mask-related errors and simplifying the manufacturing process.

Inventive Principle:
Principle #2Taking out (Extraction)

2Manufacturing precision

If fine metal masks are used for patterning, then manufacturing precision may be maintained, but manufacturing yield decreases due to reduced thickness and damage during processing

Engineering Contradiction:
Improvepatterning precisionVSAvoidmanufacturing yield
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent performs preliminary patterning of the pixel electrode before forming the light-emitting layer. The pixel electrode pattern is created first with appropriate thickness and structure, then the light-emitting layer is deposited and patterned to align with this pre-formed electrode pattern. This preliminary action eliminates the need for subsequent mask-based patterning, preventing thickness reduction and damage that would occur with fine metal masks.

Inventive Principle:
Principle #10Preliminary action

3Area of stationary object

If light-emitting devices are spaced closer together to increase aperture ratio, then display quality improves, but leakage currents increase and reliability decreases

Engineering Contradiction:
Improveaperture ratioVSAvoiddevice reliability
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The patent introduces an insulating layer as an intermediary between adjacent light-emitting devices. This insulating layer is positioned to cover the side surfaces and top surfaces of the pixel electrodes, effectively blocking leakage currents that would otherwise flow between closely spaced devices. The intermediary insulating layer enables closer spacing for higher aperture ratio while maintaining reliability by preventing electrical interference.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Area of stationary object

If aperture ratio is increased by closer spacing of light-emitting devices, then display quality improves, but manufacturing precision requirements increase

Engineering Contradiction:
Improveaperture ratioVSAvoidalignment precision
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The patent merges the patterning steps for the pixel electrode and light-emitting layer into a single self-aligned process. The light-emitting layer is deposited over the entire substrate and then patterned using the pixel electrode pattern as a reference, combining what would otherwise be separate high-precision alignment steps into one unified process. This merging approach enables closer spacing for higher aperture ratio without proportionally increasing manufacturing precision requirements.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS20250024722A1Display Device And Method For Manufacturing Display Device
Publication Date: 2025.01.16 SEMICON ENERGY LAB CO LTD
  • US20250024722A1 patent drawing
  • US20250024722A1 patent drawing
  • US20250024722A1 patent drawing

AI summary

A method for manufacturing a highly reliable display device is provided. A first conductive layer and a second conductive layer are formed; a first conductive film is formed over the first conductive layer and the second conductive layer; a first film is formed over the first conductive film; a first mask film is formed over the first film; the first film and the first mask film are processed to form a first layer and a first mask layer over the first conductive film overlapping with the first conductive layer; an exposed portion of the first conductive film is removed to form a third conductive layer in a region overlapping with the first conductive layer, the first layer, and the first mask layer; a second conductive film is formed over the first mask layer and the second conductive layer; a second film is formed over the second conductive film; a second mask film is formed over the second film; the second film and the second mask film are processed to form a second layer and a second mask layer over the second conductive film overlapping with the second conductive layer; and an exposed portion of the second conductive film is removed to form a fourth conductive layer in a region overlapping with the second conductive layer, the second layer, and the second mask layer.