Display Substrate Alignment Marks for Mask Positioning
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Solution Overview
Problem
In the manufacturing of organic light emitting displays, achieving accurate alignment between the substrate and the pattern mask is crucial to prevent process failures, but existing methods lack precision, leading to potential errors in the deposition of organic emission layers.
Innovation Solution
A substrate with specific alignment marks and a method for using these marks to assess and adjust the positional relationship between the substrate and the mask, ensuring accurate alignment and deposition of materials, including a thin film test indicator to calibrate alignment and prevent interference with measurement equipment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional alignment methods are used between substrate and pattern mask, then the manufacturing process can proceed, but alignment precision is insufficient leading to deposition errors
Solution Approach 1:
The patent applies preliminary action by pre-forming test indicators on the substrate before the actual deposition process. These indicators serve as reference markers that enable alignment verification to be performed in advance, allowing correction of positional deviations before critical deposition occurs, thus preventing deposition errors while maintaining manufacturing flow
Solution Approach 2:
The patent introduces test indicators as intermediary elements between the substrate and the pattern mask alignment system. These indicators act as mediators that facilitate precise alignment by providing measurable reference points, enabling the alignment system to accurately determine relative positions without directly measuring the substrate-mask interface, thereby improving both measurement and deposition precision
2Ease of operation
If alignment marks are placed close to pixel areas for easy measurement, then measurement convenience improves, but interference with pixel formation and measurement range are reduced
Solution Approach 1:
The patent applies segmentation by dividing the substrate into distinct functional zones: a first area containing pixel formation regions and a second area containing test indicators. This spatial segmentation allows the test indicators to be measured conveniently while being positioned far enough from pixel areas to avoid interference, thus maintaining both measurement convenience and alignment measurement accuracy
Solution Approach 2:
The patent resolves the spatial conflict by transitioning to another dimension - placing test indicators in a separate spatial dimension (the second area) rather than competing for space in the pixel formation area. This dimensional separation enables independent optimization of both measurement accessibility and pixel formation integrity, maintaining measurement convenience without compromising accuracy
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables substantially accurate alignment and material deposition, enhancing the quality of the display device by maximizing measurement range and preventing alignment errors, thus ensuring precise formation of organic emission layers.
Implementation Method 1
An organic material evaporated from the deposition source may pass through the opening of the pattern mask and may be deposited on the substrate so as to form the organic emission layer
Data Source
AI summary
A substrate is for use in manufacturing a display device. The substrate includes a first area that corresponds to pixel positions. The substrate further includes a second area adjacent to the first area. The substrate further includes a first mark disposed in the second area, wherein a first virtual line corresponds to the first mark. The substrate further includes a second mark disposed in the second area and spaced from the first mark, wherein a second virtual line corresponds to the second mark and intersects the first virtual line at a virtual reference point. The substrate further includes an indicator disposed in the second area, spaced from the first mark and the second mark, and corresponding to an opening of a mask, wherein a positional relation between the virtual reference point and a point of the indicator represents a positional relation between the substrate and the mask.