Display Panel Substrate Alignment Marks with Dielectric Recess
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Solution Overview
Problem
Conventional display panel manufacturing methods face alignment issues due to step height differences in alignment mark areas, leading to misalignment of subsequent film layers and reduced product quality.
Innovation Solution
A substrate for display panels is designed with a first alignment mark and an auxiliary alignment mark featuring a recess in the dielectric layer, along with a second dielectric layer having an opening that encompasses the auxiliary alignment mark, and an electrically conductive layer covering the recess, which reduces step height differences and minimizes residue from common electrode material, thereby improving alignment accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If alignment marks are formed directly on the support without dielectric layers, then alignment precision is improved, but subsequent film layer deposition creates step height differences that cause misalignment
Solution Approach 1:
The patent forms alignment marks on the support before depositing dielectric layers, establishing precise alignment references in advance. The first dielectric layer is then deposited to cover the alignment marks, and a second dielectric layer with openings is formed to expose the alignment marks for subsequent processing steps, maintaining alignment precision while enabling proper film layer deposition.
Solution Approach 2:
The patent introduces vertical dimensionality by creating a multi-layer dielectric structure with openings. The second dielectric layer contains openings that expose the alignment marks, allowing the alignment marks to be accessible in the vertical dimension for subsequent processing while being protected by the dielectric layers during deposition.
2Object-affected harmful factors
If dielectric layers completely cover alignment marks, then substrate protection is improved, but alignment marks become inaccessible for subsequent processing
Solution Approach 1:
The patent segments the dielectric layer into two distinct layers: a first dielectric layer that completely covers the alignment marks for protection, and a second dielectric layer with selective openings that expose the alignment marks when needed. This segmentation allows the structure to provide both protection and accessibility at different processing stages.
Solution Approach 2:
The patent creates a dynamic structure where the accessibility of alignment marks changes through the formation of openings in the second dielectric layer. The openings are formed at specific stages to expose the alignment marks for subsequent processing steps, making the structure adaptable to different processing requirements.
3Measurement precision
If alignment mark areas have different heights than surrounding areas, then alignment mark visibility is improved, but step height differences cause misalignment of subsequent film layers
Solution Approach 1:
The patent applies different properties to different regions: the alignment mark areas maintain their distinct identity through the dielectric layers, while the surrounding areas have uniform dielectric coverage. The second dielectric layer has openings specifically at the alignment mark locations, creating local variations that preserve visibility without causing step height issues in the surrounding areas.
Solution Approach 2:
The patent introduces the second dielectric layer with openings as an intermediary structure between the alignment marks and the subsequent film layers. This intermediary structure allows the alignment marks to remain visible and accessible while providing a uniform surface for film layer deposition, eliminating the direct step height difference between alignment mark and surrounding areas.
Data Source
AI summary
Disclosed herein is a substrate of a display panel, comprising: a support; a first alignment mark on the support; a first dielectric layer covering the first alignment mark; an auxiliary alignment mark aligned with the first alignment mark, wherein the auxiliary alignment mark comprises a recess into the first dielectric layer. Further disclosed herein is a display panel comprising the substrate, and a system comprising the display panel. Also disclosed herein is a method comprising: forming a first alignment mark on a support; forming a first dielectric layer covering the first alignment mark; and forming an auxiliary alignment mark aligned with the first alignment mark; wherein the auxiliary alignment mark comprises a recess into the first dielectric layer.