Display Substrate Contact Electrode Etching Protection
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Solution Overview
Problem
In TFT-LCD display substrates, the direct lapping of signal lines from different metal layers using identical or similar materials leads to damage of one metal layer during etching, resulting in production inefficiencies and increased costs.
Innovation Solution
A display substrate design featuring a first electrode line at the periphery region with an insulating layer, a through hole, and a contact electrode that electrically connects to a second electrode line, where the contact electrode covers the bottom of the through hole, preventing damage to the first electrode line during etching of the second electrode line.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If direct lapping of signal lines from different metal layers is performed using identical or similar materials, then the signal lines can be connected between layers, but one metal layer is damaged during etching of the other metal layer
Solution Approach 1:
An insulating layer is introduced as an intermediary between the first and second electrode lines. This insulating layer allows the signal lines to be electrically connected through a contact electrode while physically isolating the two metal layers during etching processes, thereby preventing etching damage to one layer when processing the other.
2Device complexity
If signal lines in different metal layers are directly lapped, then the structure remains simple, but production efficiency decreases due to damage during etching
Solution Approach 1:
The structure is segmented by introducing an insulating layer between the metal layers, which separates the etching processes for each layer. This segmentation allows independent processing of each metal layer without mutual interference, thereby improving production efficiency while maintaining reasonable structural complexity.
3Ease of manufacture
If signal lines in different metal layers are directly lapped, then manufacturing process is simplified, but manufacturing cost increases due to rework from damage
Solution Approach 1:
The insulating layer is deposited in advance between the metal layers before the etching processes are performed. This preliminary action prevents etching damage before it can occur, eliminating the need for rework and reducing material waste, thereby making the manufacturing process more cost-effective.
Data Source
AI summary
The disclosure discloses a display substrate and a manufacturing method thereof, and a display device, the display substrate comprises a display region and a periphery region, a first electrode line is arranged at the periphery region, an insulating layer is arranged on the first electrode line, a first through hole is provided in the insulating layer at a position corresponding to the first electrode line, a contact electrode is provided in the first through hole, a second electrode line is arranged on the insulating layer, the second electrode line is electrically connected to the first electrode line through the contact electrode. In the disclosure, the contact electrode is provided between the first and second electrode lines, thus when the second electrode line is etched, the first electrode line is protected by the contact electrode from being damaged by etchant, thus saving production cost and improving production efficiency.