Display Substrate Heating Layout for Uniform Thermal Treatment
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Solution Overview
Problem
Existing display device manufacturing processes face challenges in uniformly heat-treating large area substrates and adjusting the process temperature profile, which can lead to defects such as luminance differences and stains.
Innovation Solution
An apparatus comprising a chamber with a heating member featuring a first heater and a second heater facing each other, a height adjustment member, and a driving unit to adjust the height of the target substrate, ensuring uniform heat treatment and adjustable temperature profiles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single heater is used to heat the substrate, then the device complexity is low, but the temperature uniformity across large area substrates deteriorates
Solution Approach 1:
The heating structure is divided into multiple independent heating zones (first heating zone, second heating zone, third heating zone) with separate heaters. Each heating zone can be independently controlled to provide heat from different locations, enabling uniform temperature distribution across large area substrates by compensating for heat loss in different regions.
Solution Approach 2:
The heating approach transitions from a single-plane heater to a three-dimensional heating configuration with heaters positioned at different heights and locations (first heater at substrate level, second heater above substrate, third heater below substrate). This spatial distribution creates a thermal equilibrium zone that provides uniform heating across the substrate surface.
2Productivity
If the substrate is placed close to the heater for efficient heating, then the heating efficiency is high, but the temperature distribution uniformity deteriorates
Solution Approach 1:
The substrate is positioned within a thermal equilibrium zone formed by heaters at multiple heights and locations. The first heater is at the substrate level, the second heater is positioned above the substrate, and the third heater is below the substrate. This three-dimensional arrangement creates a thermal equilibrium zone where heat is distributed uniformly from all directions, maintaining both heating efficiency and temperature uniformity.
3Area of stationary object
If the heater size is increased to cover large substrates, then the heating coverage is improved, but the device complexity and energy consumption increase
Solution Approach 1:
Instead of using a single large heater, the heating system is segmented into multiple smaller heaters positioned at different locations and heights. The first heater covers the substrate area at substrate level, the second heater covers the substrate from above, and the third heater covers the substrate from below. This segmentation provides comprehensive heating coverage while maintaining manageable device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus enables uniform heat treatment of large area substrates, preventing defects like luminance differences and stains by maintaining a consistent temperature across the substrate.
Implementation Method 1
a heating member disposed inside the chamber to provide a thermal atmosphere inside the chamber, where the heating member includes a first heater and a second heater facing each other
Data Source
AI summary
An apparatus for manufacturing a display device includes a chamber, a heating member disposed inside the chamber to provide a thermal atmosphere inside the chamber, where the heating member includes a first heater and a second heater facing each other, a height adjustment member including an end disposed between the first heater and the second heater, and a driving unit which drives the end of the height adjustment member to move up or down such that the end of the height adjustment member is located at one of a first height and a second height which are different heights between the first heater and the second heater. Each of the first height and the second height is different from a height of a top surface of the first heater, and different from a height of a bottom surface of the second heater facing the top surface of the first heater.