Display Substrate Hollowed-Out Alignment Marks
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Solution Overview
Problem
In the COA technology, the black matrix formed on the array substrate makes it difficult to identify position aligning marks due to its high optical density, leading to inaccurate alignment, while a low optical density degrades the light shielding effect, and existing methods struggle to achieve accurate position alignment.
Innovation Solution
A display substrate with a control portion and a color portion, including a color filter layer and a black matrix, where position aligning marks are formed in a hollowed-out structure, providing a significant height difference for accurate alignment, and an additional planarization layer with similar marks to enhance detectability during exposure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the black matrix is made of a material with high optical density, then the light shielding effect is improved, but the position aligning marks become difficult to identify
Solution Approach 1:
The patent divides the black matrix into two functional parts: a first black matrix layer that provides light shielding, and a second black matrix layer with opening portions that expose the position aligning marks. This segmentation allows each part to fulfill its specific function without interfering with the other.
Solution Approach 2:
The patent extracts the position aligning marks from beneath the black matrix by creating opening portions in the second black matrix layer. This extraction makes the aligning marks visible and detectable while maintaining the light shielding function of the black matrix in other areas.
2Difficulty of detecting and measuring
If the black matrix is made of a material with low optical density, then the position aligning marks become easier to identify, but the light shielding effect is degraded
Solution Approach 1:
The patent segments the black matrix into two layers with different functions: the first layer maintains high optical density for light shielding, while the second layer contains opening portions that allow detection of aligning marks. This resolves the contradiction by spatially separating the light shielding function from the detection function.
Solution Approach 2:
The patent applies different properties to different locations of the black matrix. The first black matrix layer maintains high optical density throughout, while the second layer has localized opening portions at specific positions where aligning marks need to be detected, allowing local variation in optical properties.
3Object-affected harmful factors
If the black matrix completely covers the position aligning marks, then the light shielding effect is improved, but the level drop or height difference is reduced making alignment difficult
Solution Approach 1:
The patent extracts the position aligning marks from beneath the black matrix by creating opening portions in the second black matrix layer. This extraction restores the height difference and level drop at the aligning marks, making them detectable while maintaining complete coverage elsewhere for optimal light shielding.
Solution Approach 2:
The patent solves the alignment detection problem by transitioning from a two-dimensional planar structure to a three-dimensional structure with varying heights. The opening portions in the second black matrix layer create detectable height differences that enable precise alignment without compromising the light shielding effect.
Data Source
AI summary
A display substrate and a method of manufacturing the same, and a display device, are disclosed. The display substrate includes a control portion and a color portion, the control portion and the color portion both including position aligning regions at corresponding positions and further including position aligning marks provided in the position aligning regions. The black matrix is located on top of the color portion and at least the position aligning marks in the color filter layer are formed in a hollowed-out structure. The position aligning marks has an increased level drop or height difference, such that more accurate position alignment may be achieved by identifying the position aligning marks based on height difference at edge of standard pattern.