Multi-Unit Display Substrate Inspection Boundary Overlap
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Solution Overview
Problem
Existing inspection apparatuses for display substrates face challenges in reliably determining defects, particularly due to overlapping regions between photographing areas that can cause shading differences and misinterpretation of cell regions as defects.
Innovation Solution
The inspection apparatus includes multiple photographing units that can independently adjust their photographing regions, with the boundaries of these regions overlapping a boundary region on the display substrate in a plan view, thereby avoiding overlap with cell regions and reducing the likelihood of false defect detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple photographing units are used to inspect the display substrate, then the inspection coverage and efficiency are improved, but the overlapping regions between photographing areas cause shading differences and false defect detection
Solution Approach 1:
The inspection system is divided into multiple photographing units, each responsible for specific regions of the display substrate. By segmenting the inspection task across multiple units that can independently adjust their photographing regions, the system achieves comprehensive coverage while minimizing overlapping areas that cause shading differences and false defect detection.
2Reliability
If the photographing regions are adjusted to avoid overlapping cell regions, then false defect detection is reduced, but the complexity of adjusting multiple photographing units increases
Solution Approach 1:
The photographing units are equipped with dynamic adjustment capabilities, allowing them to independently modify their photographing regions based on the specific inspection requirements. This dynamic adaptability enables the system to optimize the photographing regions for each inspection task, avoiding fixed complex adjustments while maintaining high reliability in defect determination.
Data Source
AI summary
An inspection apparatus includes: a stage on which a display substrate having a plurality of cell regions and a boundary region adjacent to the plurality of cell regions is seated and a plurality of photographing units which photograph the display substrate. The plurality of photographing units may include a first photographing unit which photographs a first photographing region of the display substrate and a second photographing unit which photographs a second photographing region adjacent to the first photographing region of the display substrate, the first photographing unit is capable of independently adjusting the first photographing region and the second photographing units is capable of independently adjusting the second photographing region, and a boundary of the first photographing region and a boundary of the second photographing region overlap the boundary region in a plan view.