Display Substrate Insulating Layers Prevent Short Circuits
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Solution Overview
Problem
Current TFT-LCD production processes face significant issues with foreign particles, such as conductive particles, depositing on substrates and causing short circuits between data lines and transparent electrodes, leading to poor signal transmission and defective display points.
Innovation Solution
The implementation of a display substrate structure with multiple insulating layers, including a silicon-nitrogen or silicon-oxygen compound layers, to space apart the data line and transparent electrodes, reducing the likelihood of electrical conduction and short circuits, even in the presence of conductive particles. This is achieved through specific layer configurations and via holes with connection layers for electrical connectivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single insulating layer is used between data line and transparent electrode, then the structure is simple and manufacturing is easier, but conductive particles can cause short circuits between data line and transparent electrode
Solution Approach 1:
The patent divides the insulating layer into multiple separate insulating layers (first insulating layer, second insulating layer, third insulating layer) between the data line and transparent electrode. This segmentation ensures that even if conductive particles are present, they cannot bridge through all layers to cause a short circuit, thereby improving reliability without significantly complicating the manufacturing process.
2Reliability
If multiple insulating layers are added to prevent short circuits, then reliability improves, but the manufacturing process becomes more complex
Solution Approach 1:
The patent implements multiple insulating layers (first, second, and third insulating layers) with different material compositions. Each layer can be formed using standard deposition processes, and the segmentation allows for better particle containment while maintaining compatibility with existing manufacturing workflows, thus improving reliability with manageable manufacturing complexity.
3Productivity
If the apparatus chamber space is large, then more equipment can be accommodated, but foreign particles are more easily deposited on substrates
Solution Approach 1:
The patent converts the harmful effect of potential particle contamination into a beneficial design feature by using multiple insulating layers. The layered structure is designed with the understanding that particles may be present, and each layer acts as a barrier, transforming the contingency of particle presence into an opportunity to demonstrate the robustness of the multi-layer design.
Solution Approach 2:
The patent applies prior cushioning by pre-establishing multiple insulating layers before any particle contamination can occur. These layers serve as preventive barriers that are already in place to cushion against potential short circuits caused by conductive particles, ensuring reliability even in large-chamber environments where particle deposition is more likely.
Data Source
AI summary
The present disclosure relates to a display substrate comprising a substrate; a data line disposed over the substrate; a first insulating layer disposed on the data line; a second insulating layer disposed on the first insulating layer; a first transparent electrode disposed on the second insulating layer. The present disclosure further relates to a manufacturing method of a display substrate and a display device.