Display Substrate Pad Electrode Corrosion Prevention
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Solution Overview
Problem
During the manufacturing process of display devices, the conductive pads can be undesirably corroded when ions are released from the conductive layers, leading to unsatisfactory quality due to the contact with etched conductive layers, which affects the integrity and performance of the display substrate.
Innovation Solution
A method of manufacturing a display substrate that includes forming a semiconductor member and electrodes on a substrate, followed by an inorganic insulation layer and an organic insulation member with varying thicknesses, using a halftone mask for precise exposure and etching, and ashing to prevent corrosion of the pad electrodes, ensuring they are not exposed to corrosive ions during the etching process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the conductive layer is etched for forming electrodes of the pixels, then the pixel electrodes can be formed, but the pads may contact ions released from the conductive layer and be undesirably corroded
Solution Approach 1:
The patent divides the insulation layer into multiple segments: a first insulation layer covering the pad electrode, a second insulation layer covering the conductive layer, and a third insulation layer between them. This segmentation allows the etching process to proceed while the first insulation layer protects the pad electrode from corrosive ions released during etching.
Solution Approach 2:
The first insulation layer acts as an intermediary protective barrier between the pad electrode and the corrosive environment during etching. It mediates the exposure by being selectively removed only in specific regions after serving its protective function, preventing direct contact between ions and the pad electrode.
2Reliability
If the insulation layer is formed to protect the pad electrode, then corrosion can be prevented, but the manufacturing process becomes more complex
Solution Approach 1:
The patent combines multiple insulation functions into a coordinated multi-layer system where each layer serves specific purposes. The first, second, and third insulation layers work together to provide protection while enabling subsequent processing steps, reducing the need for separate protective measures.
Solution Approach 2:
The first insulation layer is formed preliminarily before the etching process to protect the pad electrode. This preliminary protective action is integrated into the manufacturing sequence, allowing the etching to proceed safely without requiring additional protective steps during the process.
3Ease of manufacture
If the organic insulation member has uniform thickness, then manufacturing is simpler, but precise control of etching depth and pad exposure is difficult
Solution Approach 1:
The organic insulation member exhibits local quality variations with different thicknesses in different regions. It has a first thickness in the pixel area and a second thickness less than the first thickness in the pad area, allowing precise control of etching depth and selective exposure of pad electrodes while maintaining manufacturing feasibility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively prevents corrosion of the pad electrodes, ensuring a satisfactory quality of the display substrate by maintaining the integrity of the conductive materials and enhancing the manufacturing process efficiency with reduced costs and time.
Implementation Method 1
ashing the organic insulation member
Implementation Method 2
etching the first portion and the second portion of the inorganic insulation layer using an etching gas
Data Source
AI summary
A method of manufacturing a display substrate may include the following steps: forming a drain electrode on a pixel area of a substrate; forming a pad electrode on a pad area of the substrate; forming an inorganic insulation layer that covers the drain electrode and the pad electrode; forming an organic insulation member that has a first thickness at the pixel area of the substrate, has a second thickness less than the first thickness at the pad area of the substrate, exposes a first portion of the inorganic insulation layer on the drain electrode, and exposes a second portion of the inorganic insulation layer on the pad electrode; removing the first portion of the inorganic insulation layer and the second portion of the inorganic insulation layer; and partially removing the organic insulation member.