Flexible Display Substrate Release via N2O Plasma-Treated Oxide
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Solution Overview
Problem
The challenge in manufacturing flexible display apparatuses lies in the difficulty of separating the display substrate from the carrier substrate during the manufacturing process.
Innovation Solution
A method involving plasma-treatment of a first inorganic layer using nitrous oxide gas to vary the oxygen and hydrogen content within the layer, followed by forming a display substrate and barrier layers with specific oxygen and hydrogen content gradients, facilitates easy separation of the display substrate from the carrier substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If plasma-treatment is applied to the first inorganic layer using nitrous oxide gas, then the oxygen content increases and hydrogen content decreases, improving the ease of separation between display substrate and carrier substrate, but the manufacturing process complexity increases
Solution Approach 1:
The patent applies plasma treatment using nitrous oxide gas to change the chemical composition parameters of the first inorganic layer, specifically increasing oxygen content and decreasing hydrogen content. This parameter change modifies the bonding characteristics between the inorganic layer and carrier substrate, enabling easier separation while maintaining display quality.
Solution Approach 2:
The first inorganic layer serves as an intermediary layer between the carrier substrate and display substrate. By controlling its oxygen and hydrogen content through plasma treatment, the layer acts as a controlled interface that facilitates separation while maintaining structural integrity during manufacturing.
2Force
If the oxygen content in the first inorganic layer is increased from bottom to top through plasma treatment, then the bonding force with carrier substrate is reduced, but the manufacturing precision requirements increase
Solution Approach 1:
The patent creates a non-uniform oxygen distribution within the first inorganic layer, with oxygen content increasing from the bottom surface (facing carrier substrate) to the upper surface. This local quality variation is achieved through controlled plasma treatment and is essential for reducing bonding force at the separation interface while maintaining layer integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method enables efficient separation of the display substrate from the carrier substrate by minimizing electrostatic attraction, reducing bonding forces, and enhancing the flexibility of the display apparatus.
Implementation Method 1
plasma-treating the first inorganic layer by using nitrous oxide gas (N2O)
Implementation Method 2
minimizing electrostatic attraction
Data Source
AI summary
Provided are a display apparatus, which may be easily separated from a carrier substrate, and a method of manufacturing the same. The method of manufacturing a display apparatus includes: forming, on a carrier substrate, a first inorganic layer including silicon oxide; plasma-treating the first inorganic layer by using nitrous oxide gas; after the plasma-treating, forming a display substrate on the first inorganic layer; forming a display element layer above the display substrate; and separating the display substrate from the carrier substrate.