Display Substrate Spacer Height Uniformity via Local Mask Transparency
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Solution Overview
Problem
In liquid crystal displays, the height uniformity of secondary spacers is poor due to a smaller mask plate area, affecting the buffering of external forces, which compromises the deformation and stability of the display.
Innovation Solution
A display substrate with main and secondary spacers where the sum of thicknesses of the black matrix and color filter layers under secondary spacers is smaller than under main spacers, allowing for varying distances from the substrate to provide effective force buffering.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If the mask plate area for forming secondary spacers is reduced to create height difference, then the height difference between main spacers and secondary spacers is achieved, but the height uniformity of secondary spacers deteriorates
Solution Approach 1:
The patent applies local quality by making the mask plate transparent at specific locations corresponding to where secondary spacers should be formed. This allows the secondary spacers to be formed with the same mask plate area as main spacers, achieving both height difference (through selective transparency) and height uniformity (through consistent exposure area). The local transparency modification enables differential spacer formation without sacrificing uniformity.
2Shape
If the area of mask plate region for forming secondary spacer is made smaller, then height difference between main and secondary spacers is achieved, but the buffering effect of external force deteriorates
Solution Approach 1:
By making the mask plate transparent at specific locations rather than reducing the overall mask plate area, the patent maintains sufficient secondary spacer coverage area for effective force buffering. The transparency modification is localized to allow light passage where secondary spacers are needed, while preserving the structural integrity and coverage area required for mechanical support and external force buffering.
3Ease of manufacture
If a single mask plate is used for both main and secondary spacers, then the manufacturing process is simplified, but the ability to achieve height difference deteriorates
Solution Approach 1:
The patent modifies the single mask plate by creating transparent regions at specific locations. This local transparency modification allows the same mask plate to serve dual purposes: forming main spacers in opaque regions and forming secondary spacers in transparent regions, thereby achieving height difference while maintaining the simplicity of a single patterning process.
Solution Approach 2:
The mask plate acts as an intermediary element that controls the formation of both main and secondary spacers through its transparency characteristics. By strategically designing transparent and opaque regions, the mask plate mediates the light exposure process to create the desired spacer height differences without requiring multiple patterning steps or separate mask plates.
Data Source
AI summary
Embodiments of the present invention disclose a display substrate and a method of manufacturing the same, and a display device comprising the display substrate. The display substrate comprises: a substrate; a black matrix layer and a color filter layer located on the substrate; and at least one main spacer and at least one secondary spacer located on the black matrix layer or the color filter layer and both having direct projections on the substrate within a region where the black matrix layer is located. A sum of thicknesses of portions of the black matrix layer and the color filter layer corresponding to each secondary spacer is smaller than that of portions of the black matrix layer and the color filter layer corresponding to each main spacer, so that a distance from a top end of the secondary spacer to the substrate is smaller than a distance from a top end of the main spacer to the substrate. As a result, a difference between the distance from the top end of the main spacer to the substrate and the distance from the top end of the secondary spacer to the substrate can be varied by adjusting a difference between the sum of thicknesses of the black matrix layer and the color filter layer directly below each main spacer and the sum of thicknesses of the black matrix layer and the color filter layer directly below each secondary spacer, thereby enabling the main spacer and the secondary spacer to provide a good effect of buffering an external force.