Display Panel Worktable with Segmented Nano-Positioning Stages
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Solution Overview
Problem
Existing worktable systems face challenges in achieving high precision and large-area manufacturing of display panels due to limitations in stroke length and precision control, leading to issues such as translational and rotational motion errors and substrate deformation during the manufacturing process.
Innovation Solution
A worktable system with a base stage and multiple first stages, each with a nano-scale stroke length, combined with a second stage using porous materials and controlled pressure, along with a sensor system for displacement measurement, to ensure precise substrate fixation and planarization, minimizing friction and substrate deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a single large-stroke worktable is used, then large-area manufacturing is enabled, but manufacturing precision deteriorates due to motion errors
Solution Approach 1:
The worktable system is divided into a base stage and multiple first stages (e.g., four stages at corners), where the base stage provides large-area coverage and each first stage provides nano-scale precision adjustment independently, resolving the contradiction between large area and high precision
Solution Approach 2:
The first stages act as intermediary components between the base stage and the substrate, providing nano-scale stroke length adjustments that compensate for motion errors while enabling large-area manufacturing through the base stage
2Reliability
If conventional fixation methods are used, then substrate fixation is achieved, but substrate deformation occurs due to friction and pressure
Solution Approach 1:
The second stage with porous material provides uniform air pressure distribution to fix the substrate without concentrated contact points, preventing deformation while achieving reliable fixation through pneumatic pressure
Solution Approach 2:
The second stage uses porous material that distributes pressure uniformly across the substrate surface, preventing localized stress concentrations that would cause deformation while maintaining secure fixation
3Manufacturing precision
If high precision control is implemented, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The system segments precision control functions into independent first stages with piezo actuators at different locations, allowing simplified individual control of each stage while achieving high overall precision through coordinated operation
Solution Approach 2:
The first stages provide nano-scale stroke length adjustments by changing the operational parameters of piezo actuators, achieving high precision control through parameter modulation rather than complex mechanical structures
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables high-precision, large-area manufacturing of display panels by compensating for errors with nanoscale resolution and maintaining substrate flatness, improving process reliability and display quality.
Implementation Method 1
each of the plurality of first stages may include a first part disposed on the base stage, and including a piezo actuator
Implementation Method 2
the second stage may include a plurality of pads, and each of the plurality of pads may include a body part disposed on the base stage, including a porous material
Data Source
AI summary
A worktable system includes a base stage extending in a first direction and a second direction intersecting the first direction, and having a first stroke length, and a plurality of first stages disposed on the base stage adjacent to each corner portion of the base stage, and the plurality of first stages move in the first direction and the second direction by a second stroke length that is smaller than the first stroke length.