Integrated Distillation Purifier for High-Purity Gas Delivery
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Solution Overview
Problem
Existing methods for delivering high purity gases, particularly in the semiconductor industry, face challenges with purity degradation during storage and contamination from particulates, which are not effectively addressed by current purifiers using carbon-based adsorbents.
Innovation Solution
A self-contained distillation purification system integrated within the gas storage container or as a compact module in the delivery system, where liquid is converted to vapor, partially condensed, and scrubbed by condensate in a dephlegmation zone, allowing for the removal of contaminants and superheating the vapor before exit, reducing heel disposal and minimizing downstream condensation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If carbon-based adsorbents are used for purification, then some contaminants are removed, but adsorption effectiveness is limited and periodic replacement is required
Solution Approach 1:
The invention changes the purification mechanism from adsorption to distillation by utilizing temperature and pressure variations. The system employs a heat exchanger to cool and condense vapor, creating liquid that flows back through the purifier, establishing a continuous distillation cycle that separates contaminants based on volatility differences without requiring adsorbent replacement
Solution Approach 2:
The invention utilizes phase transitions between vapor and liquid states to achieve purification. Vapor from the container is cooled to form condensate, which then flows back through the purifier as liquid, creating a reflux system that continuously separates contaminants through condensation and evaporation cycles rather than relying on adsorbent materials
2Quantity of substance
If liquid is stored in container for extended periods, then storage capacity is maintained, but product purity degrades over time
Solution Approach 1:
The invention performs preliminary purification action by establishing a continuous distillation cycle that actively removes degradation products as they form. The heat exchanger continuously condenses vapor and returns liquid through the purifier, preventing contaminant accumulation before it compromises product purity, rather than waiting for periodic maintenance
Solution Approach 2:
The invention maintains continuous purification action through a reflux system where condensate continuously flows back through the purifier and vapor continuously passes through the heat exchanger. This ongoing cyclic process ensures constant removal of degradation products during storage, maintaining product purity over extended periods without interruption
3Productivity
If vapor is withdrawn from container, then product delivery is achieved, but particulate contamination occurs through entrainment
Solution Approach 1:
The invention uses the container's own product as the purification medium rather than requiring separate expensive filtration systems. The withdrawn vapor itself is condensed and returned as liquid to scrub entrained particulates, utilizing the product in a cyclic manner that eliminates the need for additional disposable filtration components
Solution Approach 2:
The invention introduces condensate as an intermediary substance that mediates between the vapor stream and particulate contaminants. The liquid condensate flows through the purifier and entrains particulates from the vapor phase, acting as a intermediate medium that captures and removes contaminants while allowing the purified vapor to proceed to delivery
4Device complexity
If purifier is integrated within container, then system complexity is reduced, but heat management becomes more challenging
Solution Approach 1:
The invention merges the heat exchanger and purifier into a single integrated unit within the container. The heat exchanger is positioned to receive vapor from the container headspace and directly transfer heat to incoming vapor through shared walls or surfaces, combining cooling and purification functions in one compact assembly that manages heat efficiently through direct contact
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces contaminants and particulates, maintains high purity over an extended period, achieves high yield, and eliminates the need for auxiliary heaters, ensuring consistent delivery of high purity gases to the semiconductor industry.
Implementation Method 1
withdrawing the vapor from the container and cooling and condensing the same in a heat exchanger
Implementation Method 2
the vapor fraction scrubbed by the condensate fraction in the dephlegmation zone
Implementation Method 3
the vapor fraction comprised of the more volatile components is warmed in indirect heat exchange against the incoming vapor
Data Source
AI summary
A process and apparatus for the on-site delivery of a gas having improved purity to from a container filled with liquid under pressure and integrated with a purifier. In the process a portion of the liquid is converted to vapor by reducing the pressure in the container and expanding the thus formed vapor through a pressure reducer generating refrigeration. The cooled vapor is warmed against incoming vapor prior to exit from the purifier.